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Balance mass body

A technology for balancing mass and liquid, applied in the direction of balancing weight, etc., can solve the problems of small internal activity space of the device, small damping of metal mass blocks, occupying large space, etc., to save shell materials, ensure stability, and save production costs. Effect

Inactive Publication Date: 2012-07-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The balance mass bodies are all solid metal blocks. In order to increase the mass of the balance mass body, it is necessary to continuously increase the volume of the balance mass body, which will inevitably occupy a large amount of space, making the internal activity space of the entire device smaller, and The damping of the metal mass block is small, and the vibration reduction effect is poor

Method used

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Embodiment Construction

[0021] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0022] Please see figure 1 , figure 1 Shown is a top view of a shock absorber applying the balancing mass body of the present invention.

[0023] The shock absorber includes a basic frame 5, a workpiece table 6 and a balance mass body 4. The workpiece table 6 is movably connected to the base frame 5, and the balance mass body 4 is arranged between the base frame 5 and the workpiece table 6. When the workpiece table 6 moves, the balance mass body 4 performs a corresponding action to eliminate the movement of the workpiece table 6. The reaction force generated by the base frame 5.

[0024] Please see figure 2 , figure 2 Shown is a schematic cross-sectional structure diagram of a balance mass body in a preferred embodiment of the present invention.

[0025] The present invention proposes a bal...

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Abstract

The invention provides a balance mass body, which is used in a vibration absorbing table, and is placed between a worktable and a base frame to eliminate the counterforce generated on the base frame by the worktable. The balance mass body comprises a shell and a liquid, wherein the liquid is filled in the shell, and the density of the liquid is larger than or equal to 13.6 g / cm<3>. According to the invention, the balance mass body provided by the invention is small in volume, saves space, saves shell materials and saves production cost under the condition of identical mass; the high-density liquid has high damping, so as to well isolate vibration or even completely isolate vibration, thus the stability of the base frame is guaranteed; and by adopting the balance mass body provided by the invention, the influence of temperature change on the self volume is reduced and the system error is lowered.

Description

technical field [0001] The invention relates to a vibration damping structure, and in particular to a balance mass body used in a vibration damping device. Background technique [0002] Most of the traditional lithography machine workbench adopts multi-layer guide rail technology, and the bottom of the platform is directly connected with the shock absorption system. However, as the diameter of the silicon wafer increases from 200mm to 300mm, the requirements for productivity increase and the requirements for line width and overlay accuracy become higher and higher. Higher precision requirements, thus, higher and higher requirements on the damping system. [0003] However, it is costly and difficult to improve the damping capacity of the damping system. Therefore, the technology of balancing mass body used to counteract the motion reaction force has been developed accordingly. The balance mass technology uses the principle of momentum conservation: the stator of the motor ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/28
Inventor 王天明吴小传
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD