Surface three-dimensional measurement system with tunable beat-wave linear scanning
An interferometric measurement and line scanning technology, applied in the field of optical measurement, can solve the problems of small measurement range and inability to achieve the effect of improving measurement speed, high resolution, and simplifying the mechanism
Inactive Publication Date: 2013-05-15
BEIJING JIAOTONG UNIV
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Problems solved by technology
[0015] 1. It is a point scanning measurement method, which requires two-dimensional scanning to complete three-dimensional surface measurement
[0016] 2. The measurement range is limited by the wavelength λ of the incident light wave, the measurement range is very small, less than λ / 2, and cannot
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[0030] Attached below image 3 The present invention will be further described with specific embodiments.
[0031] like image 3 As shown, a tunable beat-wave line-scan surface three-dimensional interferometry system, the light emitted by the broadband light source is divided into two paths after passing through the first optical fiber isolator I1 and 3dB-coupler N1, and one path of light passes through the first self- The collimating mirror Z1 is collimated into a parallel beam, and the other light is also collimated into a parallel beam after passing through the second fiber isolator I2 and the second self-collimating mirror Z2. The two beams of parallel light are incident on the same point of the first diffraction grating G1 at an angle Δi, and the function of the first aperture GL1 is to remove stray light. The first diffraction grating G1 disperses the two beams of parallel light into two fan-shaped light sheets whose wavelengths are continuously distributed in space. ...
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The invention discloses a wide-range high-resolution surface three-dimensional measurement system with tunable beat-wave linear scanning, which belongs to the technical field of optical measurement and comprises a broadband light source, two optical fiber isolators, three diaphragms, three auto-collimating lenses, two diffraction gratings, seven plane cylindrical lenses, two linear array photoelectric couplers, a 3-dB coupler, a beam splitter, a longitudinal micro-motion worktable, a transverse micro-motion worktable, a data acquisition card, a signal generator, drive control, a computer and result output. A beat-wave plate is used for scanning a surface to be measured, one linear array photoelectric coupler is used for detecting beat-wave interference signals, the range is half of beat-wave length, the other linear array photoelectric coupler is used for detecting single-wavelength interference signals to determine resolution, and the system is provided with wide range and high resolution. Different ranges can be obtained by adjusting the beat-wave length. Surface three-dimensional measurement can be complete with only one-dimensional scanning, so that mechanism is simplified, and measurement speed is increased. By means of common-path interference, the system is high in interference resistance and suitable for online measurement.
Description
technical field [0001] The invention relates to the field of optical measurement, in particular to a large-range and high-resolution surface three-dimensional measurement system. Background technique [0002] The existing literature close to this technology has the following two: [0003] [1] D.P.Hand, T.A.Carolan, J.S.Barton, and J.D.C.Jones. "Profile measurement of optically rough surfaces by fiber-optic interferometry", Opt.Lett., Vol.18, No.16, 1993, P.1361-1363 .(Optics Letters, Volume 18, Issue 16, P.1361-1363) [0004] The technical principle of literature [1] is as follows: figure 1 shown. [0005] The light emitted by the semiconductor laser passes through the Faraday isolator and the fiber 3dB-coupler, and then reaches the measuring head. The measuring head is a Fizeau interferometer. A part of the light is reflected by the end face of the fiber as the reference light, and the other part of the light is focused by the self-focusing lens. Projected onto the meas...
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IPC IPC(8): G01D21/00G01B9/023
Inventor 谢芳马森刘义秦李昭莹
Owner BEIJING JIAOTONG UNIV