Micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and preparation method thereof

Abstract

The invention discloses a micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel and a preparation method thereof. The preparation method comprises the steps of: directly preparing a high density and high aspect ratio nano forest structure on each surface of a silicon-based micron dimension groove by utilizing DRIE (Deep Reactive Ion Etching) without mask optimization; then transferring the silicon-based micron dimension groove and the nano forest structure on the surface thereof to PDMS (Polydimethylsiloxane) by utilizing a casting mould method; then carrying out a surface physicochemical treatment on the PDMS by utilizing a DRIE post-treatment technology to reduce a surface energy, thereby realizing the PDMS three-dimensional anti-drag micro-channel with super-hydrophobic properties. The micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel, disclosed by the invention, can improve surface to volume ratio extremely, reduce the surface energy, thereby enabling the surface of the micro-channel to have the super-hydrophobic properties, realize an excellent anti-drag effect, and further improve steady super-hydrophobic properties of the surface, thereby extremely improving the anti-drag effect thereof; and the micro-nano integrated processing technology based implantable three-dimensional anti-drag micro-channel, disclosed by the invention, has the advantages of simple technology, low cost and easy industrialization.

Description

technical field [0001] The invention relates to the technical field of micromachining, in particular to an implantable three-dimensional drag-reducing microfluidic channel based on micro-nano integrated processing technology and a preparation method thereof. Background technique [0002] Since its emergence in the 1980s, microelectromechanical system (MEMS), as a new, high-tech multi-field interdisciplinary subject, has been hailed as a new technological revolution leading the development of the microelectronics industry in the new century. Widespread attention. Among them, Bio-medical MEMS, as one of the most important branches of MEMS, has been closely watched by scientific research institutions and industries, and the most eye-catching one is the micro total analysis system (micro total analysis system) , ie μTAS) is also called Lab-on-a-chip (Lab-on-a-chip). It is a complete microsystem that integrates the three steps of sample preparation, biochemical reaction and res...

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Problems solved by technology

In recent years, researchers have proposed a drag-reducing channel design based on surface modification of micro-nano dual-scale particles [Example: Lu Si, Chinese Science: Series G, 2010, 40: 916-924], which can achieve high-efficiency drag-reducing effects, However, the realization of the above-mentioned micro-nano dual-scale particle structure usually requires multi-step complex processes and high cost. More importantly, it is difficult to realize the drag-reducing structure on the sidewall and top surface of the groove, that is, it is impossible to realize the real three-dimensional drag-reducing microstructure. Runner

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