Phase detector based on micro-mechanical gallium arsenide-based cantilever beam and detection method

A phase detector, gallium arsenide-based technology, applied in the phase angle between voltage and current, instruments, measuring devices, etc., can solve problems such as complex structure, and achieve the effect of easy integration, simple structure, and easy measurement

Inactive Publication Date: 2012-10-17
SOUTHEAST UNIV
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Problems solved by technology

The existing microwave phase detection technology is based on the principle of diode, multiplier and vector operation, which h

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  • Phase detector based on micro-mechanical gallium arsenide-based cantilever beam and detection method
  • Phase detector based on micro-mechanical gallium arsenide-based cantilever beam and detection method
  • Phase detector based on micro-mechanical gallium arsenide-based cantilever beam and detection method

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[0018] The present invention will be further described below with reference to the accompanying drawings.

[0019] see Figure 1-3 , the present invention provides a cantilever beam phase detector based on micromachined gallium arsenide, the frequency detector includes

[0020] A gallium arsenide substrate 1, a source electrode 2 and a drain electrode 3 grown on the surface of the gallium arsenide substrate 1 for outputting a saturation current, the source electrode 2 and the drain electrode 3 are arranged opposite to the source electrode 2 and the drain electrode The grid 4 between 3 is arranged on the cantilever beam 6 above the grid 4 and opposite to the grid 4, and one end of the cantilever beam 6 is respectively connected to the cantilever beam anchor area 7;

[0021] A pull-down electrode 8 is provided between the gate 4 and the fixed beam anchor region 7, and the pull-down electrode 8 is covered by an insulating medium layer 9;

[0022] The source 2 is grounded, and t...

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Abstract

The invention discloses a phase detector based on a micro-mechanical gallium arsenide-based cantilever beam. The phase detector comprises a gallium arsenide substrate (1), a source (2) and a drain (3), wherein the source (2) and the drain (3) grow on the surface of the gallium arsenide substrate (1) and are used for outputting saturation current; the source (2) is opposite to the drain (3); a gate (4) is arranged between the source (2) and the drain (3); and a cantilever beam (6) is arranged above the gate (4) and opposite to the gate (4). A detection method comprises the following steps of: when direct current offset is loaded between a pull-down electrode (8) and the cantilever beam (6), and the cantilever beam (6) is pulled down and contacted with the gate (4), loading a microwave signal to be detected on the cantilever beam (6) to the gate (4) through a first pressure welding block (12); and through a capacitor and a filter, detecting the size of the saturation current of the source (2) and the drain (3), so phase detection is realized. The invention has the advantages of simple structure and convenience for measurement.

Description

technical field [0001] The invention provides a cantilever beam phase detector based on a micromechanical gallium arsenide base and a preparation method thereof, and belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] In microwave technology research, phase is one of the important parameters to characterize microwave signals. Microwave signal phase detection system is widely used in phase modulator, phase shift keying, microwave positioning, antenna phase pattern test and near-field diagnosis. The existing microwave phase detection technology is based on the principle of diode, multiplier and vector operation. They have the advantages of low loss, high sensitivity and wide frequency band. However, their biggest disadvantage is the complex structure. With the development of microelectronics technology, modern personal communication systems and radar systems have higher and higher requirements for microwave phase detectors. ...

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Application Information

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IPC IPC(8): G01R25/00
Inventor 廖小平易真翔
Owner SOUTHEAST UNIV
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