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Microwave plasma reaction device for preparing nano-material

A microwave plasma and reaction device technology, which is applied in the fields of plasma, chemical/physical/physical-chemical processes of applying energy, and electrical components, etc., can solve the problems that nano-material microwave plasma generating devices are rare and have not been popularized. , to achieve the effect of good industrial application prospects

Active Publication Date: 2012-11-28
TSINGHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, microwave plasma generating devices that can be used to prepare nanomaterials are still rare, especially devices that can work under normal temperature and pressure and are convenient for industrial application have not yet been popularized.

Method used

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  • Microwave plasma reaction device for preparing nano-material
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  • Microwave plasma reaction device for preparing nano-material

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Embodiment Construction

[0012] The microwave plasma reaction device that the present invention proposes is used for preparing nanometer material, and its structure is as figure 1 and figure 2 As shown, it includes a plasma excitation device 4 , a rectangular waveguide 1 , a reactor 12 and a collector 14 . The plasma excitation device 4 is placed on one side of the rectangular waveguide 1 , the reactor 12 is placed on the other side of the rectangular waveguide 1 , and the reactor 12 communicates with the rectangular waveguide 1 through a plasma outlet 15 . The collector 14 is placed at the lower part of the reactor 12, and the reactor 12 communicates with the collector 14.

[0013] The plasma excitation device 4 is composed of a casing 16 , a working gas channel 18 , a cooling water channel 17 , an outer adjustment column 2 and an inner adjustment column 3 . The housing 16 is fixed on the rectangular waveguide 1, the working gas channel 18, the cooling water channel 17, the inner adjustment column...

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Abstract

The invention relates to a microwave plasma reaction device for preparing nano-materials, and belongs to the technical field of microwave application. The reaction device comprises a rectangular waveguide, a plasma excitation device, a reactor and a collector. Sealing gaskets are disposed at two sides of the rectangular waveguide, and are used for forming closed gas environment in the reactor. The plasma excitation device comprises an outer adjusting column, an inner adjusting column, and a housing; the outer adjusting column is in threaded connection with the rectangular waveguide; the inner adjusting column is provided with a water circulation cooling system and a working gas channel; working gas reaches an area with high field intensity at a tip below the inner adjusting column through the channel to generate plasma; and the plasma is ejected into the reactor through a plasma outlet on the rectangular waveguide under the action of gas flow. The lower part of the reactor is connected with the collector, and the collector collects and purifies the nano-materials. The reaction device is suitable for continuous working at normal temperature and normal pressure; nano-materials with high purity and high quality are generated; and the reaction device has very good industrial application prospects.

Description

technical field [0001] The invention relates to a microwave plasma reaction device for preparing nanometer materials, belonging to the technical field of microwave applications. Background technique [0002] As one of the three key technologies for mankind in the 21st century, material technology is the "cradle" for new technologies and products in various fields, and the emergence of nanotechnology has created a new era of material science research. When material particles reach the nanometer scale, in the size range of 0.1 to 100 nanometers, the electronic structure and crystal structure of the surface will change, resulting in surface effects, small size effects, quantum effects, macroscopic quantum tunneling effects, and interface effects. This kind of material composed of particles with special properties different from atoms, molecules, and macroscopic substances is called nanomaterials. Nanomaterials have excellent properties in terms of structure, light, electricity...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/12H05H1/46
Inventor 王强王仲廖姗姗张贵新罗承沐李东红
Owner TSINGHUA UNIV