Microwave plasma reaction device for preparing nano-material
A microwave plasma and reaction device technology, which is applied in the fields of plasma, chemical/physical/physical-chemical processes of applying energy, and electrical components, etc., can solve the problems that nano-material microwave plasma generating devices are rare and have not been popularized. , to achieve the effect of good industrial application prospects
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[0012] The microwave plasma reaction device that the present invention proposes is used for preparing nanometer material, and its structure is as figure 1 and figure 2 As shown, it includes a plasma excitation device 4 , a rectangular waveguide 1 , a reactor 12 and a collector 14 . The plasma excitation device 4 is placed on one side of the rectangular waveguide 1 , the reactor 12 is placed on the other side of the rectangular waveguide 1 , and the reactor 12 communicates with the rectangular waveguide 1 through a plasma outlet 15 . The collector 14 is placed at the lower part of the reactor 12, and the reactor 12 communicates with the collector 14.
[0013] The plasma excitation device 4 is composed of a casing 16 , a working gas channel 18 , a cooling water channel 17 , an outer adjustment column 2 and an inner adjustment column 3 . The housing 16 is fixed on the rectangular waveguide 1, the working gas channel 18, the cooling water channel 17, the inner adjustment column...
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