Gray-scale mask, array substrate and manufacturing method thereof, and display device
A gray-scale mask and mask technology, which is applied in the fields of gray-scale masks, display devices, array substrates and their preparation methods, can solve problems such as etching, narrow gray-scale line patterns, and affecting product quality, and achieve Improve the yield rate, avoid over-etching, and ensure the effect of normal operation
Active Publication Date: 2014-10-15
BOE TECH GRP CO LTD
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Problems solved by technology
[0007] The technical problem to be solved by the present invention is to provide a grayscale mask array substrate and its preparation method and display device, so as to overcome the too narrow grayscale line pattern in the GOA circuit pattern area in the mask plate in the prior art , resulting in over-etching of the semiconductor layer channel region of the TFT in the GOA circuit in the ashing and etching process after the subsequent exposure, causing the GOA circuit to not work normally, thereby affecting the quality of the entire product and other defects
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[0031] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0032] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying Describes, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and operate in a specific orientation, and therefore shoul...
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Abstract
The invention relates to the field of display technologies, and especially relates to a grayscale mask, an array substrate and its preparation method, as well as a display device. The grayscale mask includes a mask main body, which is provided with a driving circuit pattern region and a pixel display pattern region. The driving circuit pattern region includes a first source electrode mask pattern and a first drain electrode mask pattern, between the two a first channel region is disposed, and a first grayscale linear pattern is arranged in the first channel region. The pixel display pattern region includes a second source electrode mask pattern and a second drain electrode mask pattern, a second channel region is disposed between the two, and a second grayscale linear pattern is arranged in the second channel region. The first grayscale linear pattern is greater than the second grayscale linear pattern in terms of width. The grayscale mask provided in the invention can effectively avoid the defect of over-etching generated by a TFT (thin film transistor) in the driving circuit region, maximally ensure normal working of the driving circuit, and improve the nondefective rate of final products.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a grayscale mask, an array substrate, a preparation method thereof, and a display device. Background technique [0002] In recent years, with the development of science and technology, liquid crystal display technology has also been continuously improved. TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Field Effect Transistor-Liquid Crystal Display) occupies an important position in the display field due to its advantages of good image display quality, low energy consumption, and environmental protection. In recent years, in order to better improve image display quality and further reduce production costs, a new technology called GOA (Gate driver On Array, gate driver circuit) has been developed to manufacture gate drive circuits on TFT array substrates. The gate drive chip can be omitted, thereby greatly reducing the production cost. [0003] In the prior art,...
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IPC IPC(8): G03F1/00G03F1/60H01L27/12
Inventor 惠官宝张锋
Owner BOE TECH GRP CO LTD