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One-chip type metal-oxide semiconductor field effect transistor-Schottky diode element

A technology of Schottky diodes and field effect transistors, which is applied in the field of monolithic metal oxide semiconductor field effect transistors-Schottky diode components, can solve the problems of affecting the performance of components and the increase of parasitic inductance, and achieve the reduction of electromagnetic interference, The effect of reducing the size of components and reducing the value of parasitic inductance

Inactive Publication Date: 2012-11-28
BEYOND INNOVATION TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the Schottky diode and the metal oxide semiconductor field effect transistor are fabricated on different chips respectively, and terminal structures are arranged around the Schottky diode and the metal oxide semiconductor field effect transistor respectively, it is necessary to set additional bonding wires to Electrically connect the Schottky diode and the metal-oxide-semiconductor field-effect transistor, which will increase the parasitic inductance value and affect the performance of the device

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  • One-chip type metal-oxide semiconductor field effect transistor-Schottky diode element
  • One-chip type metal-oxide semiconductor field effect transistor-Schottky diode element
  • One-chip type metal-oxide semiconductor field effect transistor-Schottky diode element

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Embodiment Construction

[0022] The monolithic metal oxide semiconductor field effect transistor-Schottky diode element of the present invention integrates the metal oxide semiconductor field effect transistor and the Schottky diode into a single chip, and the metal oxide semiconductor field effect transistor and the Schottky diode share terminal structure.

[0023] The present invention does not limit the types of metal oxide semiconductor field effect transistors, which can be divided into planar metal oxide semiconductor field effect transistors or trench type metal oxide semiconductor field effect transistors from the configuration of the gate; can be divided into super A super junction MOSFET, a dual gate MOSFET or a floating gate MOSFET, etc.

[0024] The invention does not limit the type of the Schottky diode, and the Schottky diode may be a junction barrier Schottky diode or a trench Schottky diode.

[0025] The present invention does not limit the type of termination structure, and the termi...

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Abstract

A one-chip type metal-oxide semiconductor field effect transistor-Schottky diode element comprises a chip, metal-oxide semiconductor field effect transistors, Schottky diodes and a terminal structure. The chip is divided into a transistor area, a diode area and a terminal area. The metal-oxide semiconductor field effect transistors are arranged on the transistor area. The Schottky diodes are arranged on the diode area. The terminal structure is arranged on the terminal area, the transistor area and the diode area are separated by the terminal area, and the metal-oxide semiconductor field effect transistors and the Schottky diodes share the terminal structure.

Description

technical field [0001] The present invention relates to a semiconductor element, and in particular to a monolithic metal oxide semiconductor field effect transistor-Schottky diode element. Background technique [0002] For the known high-efficiency DC / DC converter application technology, Schottky diodes (Schottky diode) are integrated in semiconductor power elements such as metal oxide semiconductor field effect transistors (metal oxide silicon field effect transistors, MOSFETs), making Schottky The base diode and the metal oxide semiconductor field effect transistor are arranged in parallel. In this way, the on-resistance and gate capacitance can be reduced, thereby reducing power loss and increasing the switching speed of semiconductor power elements. [0003] With the miniaturization of electronic components, an integrated monolithic component is required to reduce space occupation. [0004] Two forms of integrating Schottky diodes with MOSFETs are known. [0005] One ...

Claims

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Application Information

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IPC IPC(8): H01L27/06H01L29/06
Inventor 郑谦兴
Owner BEYOND INNOVATION TECH