Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure
A technology of scanning probe and microscope, which is applied in the field of scanning probe microscope, can solve the problems of poor stability, rough approximation motor instability, etc.
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Embodiment 1
[0025] Embodiment 1: The basic rough approximation motor can be separated from the scanning probe microscope mirror body of the scanning structure
[0026] See attached figure 2 In this embodiment, the basic rough approximation motor can be separated from the scanning probe microscope mirror body of the scanning structure, including a piezoelectric positioner 3, a sample holder 4, a probe holder 5, a rough approximation motor 6, and is characterized in that it also includes a guide rail 1, The rough approximation motor 6 and the piezoelectric positioner 3 are arranged on the guide rail 1, one of the two sides of the sample holder 4 and the probe holder 5 is arranged on the piezoelectric positioner 3, and the other is arranged on the guide rail 1, and the sample holder 4. One of the probe holder 5 and the piezoelectric positioner 3 is used as the moving body to be pushed by the rough approach motor 6 to make a rough approach between the sample holder 4 and the probe holder 5 a...
Embodiment 2
[0028] Embodiment 2: A scanning probe microscope mirror body with a dual piezoelectric positioner type rough approximation motor that can be separated from the scanning structure
[0029] Another piezoelectric positioner 3 is added between the one of the sample holder 4 and the probe holder 5 arranged on the guide rail 1 in the above-mentioned embodiment 1 and the guide rail 1 . The dual piezoelectric positioner used here can also be regarded as a split piezoelectric positioner, which is a special case of the piezoelectric positioner 3 in the first embodiment.
Embodiment 3
[0030] Example 3: The coarse approximation motor of a single or multi-dimensional piezoelectric positioner can be separated from the scanning probe microscope mirror body of the scanning structure
[0031]The piezoelectric positioner 3 in the above embodiments can be a one-dimensional, two-dimensional or three-dimensional piezoelectric positioner, and is used for one-dimensional scanning, such as: one-dimensional line scanning along the sample surface or approaching along the probe-sample Directional line scanning, two-dimensional scanning, such as: two-dimensional contour mode imaging scanning along the sample surface, or three-dimensional scanning, such as: imaging scanning with feedback adjustable probe-sample spacing.
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