Unlock instant, AI-driven research and patent intelligence for your innovation.

Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure

A technology of scanning probe and microscope, which is applied in the field of scanning probe microscope, can solve the problems of poor stability, rough approximation motor instability, etc.

Inactive Publication Date: 2013-01-09
UNIV OF SCI & TECH OF CHINA
View PDF4 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Purpose of the present invention: In order to solve the problem that the instability of the rough approximation motor in the mirror body of the existing scanning probe microscope will be transmitted to the probe-sample local interaction structure, resulting in poor stability, a rough approximation motor is proposed Scanning Probe Microscope Mirror Body Detachable from Scanning Structure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure
  • Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure
  • Scanning probe microscope body with coarse approximation motor capable of being separated from scanning structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Embodiment 1: The basic rough approximation motor can be separated from the scanning probe microscope mirror body of the scanning structure

[0026] See attached figure 2 In this embodiment, the basic rough approximation motor can be separated from the scanning probe microscope mirror body of the scanning structure, including a piezoelectric positioner 3, a sample holder 4, a probe holder 5, a rough approximation motor 6, and is characterized in that it also includes a guide rail 1, The rough approximation motor 6 and the piezoelectric positioner 3 are arranged on the guide rail 1, one of the two sides of the sample holder 4 and the probe holder 5 is arranged on the piezoelectric positioner 3, and the other is arranged on the guide rail 1, and the sample holder 4. One of the probe holder 5 and the piezoelectric positioner 3 is used as the moving body to be pushed by the rough approach motor 6 to make a rough approach between the sample holder 4 and the probe holder 5 a...

Embodiment 2

[0028] Embodiment 2: A scanning probe microscope mirror body with a dual piezoelectric positioner type rough approximation motor that can be separated from the scanning structure

[0029] Another piezoelectric positioner 3 is added between the one of the sample holder 4 and the probe holder 5 arranged on the guide rail 1 in the above-mentioned embodiment 1 and the guide rail 1 . The dual piezoelectric positioner used here can also be regarded as a split piezoelectric positioner, which is a special case of the piezoelectric positioner 3 in the first embodiment.

Embodiment 3

[0030] Example 3: The coarse approximation motor of a single or multi-dimensional piezoelectric positioner can be separated from the scanning probe microscope mirror body of the scanning structure

[0031]The piezoelectric positioner 3 in the above embodiments can be a one-dimensional, two-dimensional or three-dimensional piezoelectric positioner, and is used for one-dimensional scanning, such as: one-dimensional line scanning along the sample surface or approaching along the probe-sample Directional line scanning, two-dimensional scanning, such as: two-dimensional contour mode imaging scanning along the sample surface, or three-dimensional scanning, such as: imaging scanning with feedback adjustable probe-sample spacing.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a scanning probe microscope body with a coarse approximation motor capable of being separated from a scanning structure, comprising a piezoelectric locator, a specimen holder, a probe seat and a coarse approximation motor. The scanning probe microscope body is characterized by further comprising a guide rail, on which the coarse approximation motor and the piezoelectric locator are arranged; one of the specimen holder and the probe seat is arranged on the piezoelectric locator and the other of the two is arranged on the guide rail; one of the specimen holder, the probe seat and the piezoelectric locator is used as a moving body and pushed by the coarse approximation motor to perform coarse approximation between the specimen holder and the probe seat along the guide rail; and the coarse approximation motor is separated from the moving body when drawing back and draws back alone. A slack rope can be connected between the moving body and the coarse approximation motor so that the moving body can be pulled by the rope to draw back after the coarse approximation motor draws back to straighten the rope instead of drawing back immediately when the coarse approximation motor is drawing back. The scanning probe microscope body with the coarse approximation motor capable of being separated from the scanning structure in the invention can be used to prevent instabilities of the coarse approximation motor such as thermal drift, mechanical vibration and the like from being transferred to the scanning structure, greatly improve the imaging quality and reduce distortion; and the scanning probe microscope body is especially applicable to situations with drastic environmental change such as temperature change, filed change and the like.

Description

technical field [0001] The invention relates to a scanning probe microscope mirror body, in particular to a scanning probe microscope mirror body in which a coarse approximation motor can be separated from a scanning structure, and belongs to the technical field of scanning probe microscopes. Background technique [0002] Scanning probe microscope (SPM for short) is widely used in many national science and technology strategic fields such as nanotechnology, atomic manipulation, quantum control, molecular life science, materials and surface catalytic chemistry, etc. Play an important role. However, there are still some major problems in its development that have not been well resolved, one of which is the stability problem. [0003] The core structure of the scanning probe microscope (see attached figure 1 ) means that the probe and the sample in the scanning structure (hereinafter referred to as the scanning structure) in which the driving probe is scanned relative to the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/00
Inventor 王琦陆轻铀
Owner UNIV OF SCI & TECH OF CHINA