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Precise grating manufacturing method taking time reference as reference

A technology of time reference and grating, which is applied in the field of high-precision manufacturing of precision gratings, can solve problems such as limiting the precision level of nano-manufacturing, and achieve the effect of improving measurement accuracy

Active Publication Date: 2014-09-03
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] To sum up, the measurement benchmark based on length will be two orders of magnitude different from the measurement benchmark based on time, especially in nano-manufacturing, which will show obvious disadvantages and will limit the processing accuracy level of nano-manufacturing. improve

Method used

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  • Precise grating manufacturing method taking time reference as reference
  • Precise grating manufacturing method taking time reference as reference
  • Precise grating manufacturing method taking time reference as reference

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Embodiment Construction

[0029] The present invention will be further described below through the accompanying drawings and specific implementation examples.

[0030] like figure 1 As shown, a specific implementation of the high-energy beam nanoscale processing method based on time-based mapping length of the present invention is realized through the following steps. This example uses the above-mentioned invention to process a precision master grating mold with a high line number (1000l / mm~5000l / mm) on a cylindrical roller. It is required that the ridges of the grating lines have sub-nanometer precision. The method of edge modification. This example includes the following steps:

[0031] The first step, preparation of the workpiece 7 to be processed: select the processed cylindrical smooth roller, clean it by washing with detergent, acetone / alcohol ultrasonic cleaning, etc., dry the water, bake in the oven for 30 minutes, and install it after cooling on the rotary table.

[0032] The second step, ...

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Abstract

The invention discloses a precise grating manufacturing method taking time reference as reference. The precise grating manufacturing method provides a method utilizing time mapping length as processing control quantity reference during nanometer manufacturing, utilizes high-energy beams (electronic beams, ion beams, laser beams and the like) as processing energy sources to realize nanoscale / sub-nanoscale precise grating manufacturing. In the precise grating manufacturing method aiming to remove nanoscale precise materials during nanometer manufacturing, a mode of taking length as processing control quantity reference conventionally is avoided, and conventional length metering precision is improved by 2 orders of magnitudes. The method taking time for measuring length is applied to precise grating manufacturing and can meet processing precision requirements of nanoscale / sub-nanoscale precision gratings.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a high-precision manufacturing method of a precision grating with reference to a time reference. This method is mainly used in the manufacture of precision gratings, including circular gratings, long gratings, and surface gratings. Background technique [0002] Precision gratings are one of the key components of today's precision processing equipment, precision measurement, optical modulation, etc., and are widely used in energy, precision manufacturing, aerospace exploration, ultra-precision optical engineering and other fields. At present, the period of precision gratings is generally 500nm~10μm, and the groove structure is mainly rectangular, sinusoidal, zigzag, trapezoidal, etc. according to different applications. With the further development of ultra-precision manufacturing and ultra-precision optical engineering, the precision requirements for...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
Inventor 刘红忠蒋维涛杨俊丁玉成卢秉恒
Owner XI AN JIAOTONG UNIV