Silicon nanowire chip simultaneously detecting miRNAs and protein markers and detection method and application of silicon nanowire chip
A silicon nanowire and protein labeling technology, which is applied in nanotechnology for sensing, nanotechnology for information processing, nanotechnology, etc., can solve cumbersome step processing, sensitivity and specificity effects, low miRNAs content, etc. question
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Embodiment 1
[0063] Example 1 Preparation of silicon nanowire chips for simultaneous detection of miRNAs and protein markers
[0064] The preparation method and process of the silicon nanowire chip used for simultaneous detection of miRNAs and protein markers in the present invention, such as Figure 4 As shown, as follows:
[0065] Step S01: providing a semiconductor substrate 1;
[0066] Step S02: using a wet oxygen oxidation process to grow a silicon dioxide isolation layer 2 on the semiconductor substrate;
[0067] Step S03: growing a polysilicon layer 3 on the silicon dioxide isolation layer;
[0068] Step S04: using a dry plasma etching process to pattern the polysilicon layer 3 to form a silicon nanowire array 4;
[0069] Step S05: using a thermal oxidation method, grow a passivation layer with a certain thickness (for example: 3nm-15nm) on the silicon nanowire array 4, and grow and form TaN / Ta 2 o 5 layer, wherein the passivation layer structure from top to bottom includes SiO...
Embodiment 2
[0072] Example 2 Simultaneous detection of acute myocardial infarction miRNAs and protein markers
[0073] Using the silicon nanowire chip that can simultaneously detect miRNAs and protein markers of acute myocardial infarction, by modifying different probes or antibodies on the silicon nanowires, the simultaneous detection of miRNAs and protein markers related to acute myocardial infarction can be directly and simultaneously detected in plasma samples Research purposes.
[0074] Its detection method is as follows:
[0075] 1) Each silicon nanowire detects the current value under the voltage of 0-5V (gradient 0.1V) before loading the sample;
[0076] 2) Each silicon nanowire detects the current value under the voltage of 0-5V (gradient 0.1V) after loading the sample;
[0077] 3) Calculate the resistance value of each silicon nanowire before and after sample loading according to the voltage-to-current ratio;
[0078] 4) The resistance value ratio of each silicon nanowire bef...
Embodiment 3
[0082] Embodiment 3 Detection application of the silicon nanowire chip of the present invention
[0083] Because miRNAs and protein markers appear in different phases of changes in plasma samples of patients with myocardial infarction, the present invention prolongs the time window for diagnosis of myocardial infarction, for example, 1-72 hours, especially increases the early (within 2 hours) diagnosis possibility. A 200uL plasma sample was taken and combined with single-stranded DNA probes or antibodies modified on the surface of different silicon nanowires, resulting in changes in the resistance of each silicon nanowire before and after sample loading. Since each silicon nanowire is modified with probes for different miRNAs or antibodies for different protein markers, the absolute value of the concentration of each specific miRNA or protein marker can be obtained by analyzing the change of resistance and comparing with the standard curve. Proceed as follows:
[0084] 1) O...
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