Apparatus and method for heat treating a plurality of multilayer bodies

Abstract

The invention relates to a device for the continuous heat treatment of at least two multilayer bodies on at least two process levels arranged one above the other in at least one heating chamber and at least one cooling chamber, which are arranged one behind the other, Wherein the heating chamber comprises: a first process level (3.1) with a first process box (5.1) for at least one first multilayer body (4.1), said first process box (5.1) being located at the first radiator between the array (2.1) and the second radiator array (2.2), said radiator array having heating radiators (9) for heating the first multilayer body (4.1); the second process level (3.1), which There is a second process box (5.2) for at least one second multilayer body (4.2), said second process box (5.2) being located between the second radiator array (4.2) and the third radiator array (4.3) Between, said radiator array has heating radiators (9) for heating the second multilayer body (4.2); wherein the first radiator array (2.1) and the second radiator array (2.2) are constructed such that the first process level (2.1) is irradiated by the first radiator array (2.1) with a different radiation intensity than the second radiator array (2.2), and / or wherein the second radiator array (2.2) and the third radiator array (2.3) is configured such that the second process level (2.2) is irradiated by the second radiator array (2.2) with a different radiation intensity than the third radiator array (2.3), and wherein the cooling chamber (KK1) comprises: a cooling device ; a first process level (3.1) for cooling at least one first multilayer body (4.1); and a second process level (3.2) for cooling at least one second multilayer body (4.2).

Description

technical field [0001] The invention relates to a device and a method for heat treatment of multilayer bodies, in particular for tempering precursor layers (Vorläuferschicht) for the production of semiconductor layers which can be used, for example, as thin-film solar cells in the absorber. Background technique [0002] Photovoltaic layer systems for the direct conversion of solar radiation into electrical energy are sufficiently known. The materials and arrangement of the layers are coordinated such that incident radiation of the semiconducting layer or layers is converted directly into electrical current with the highest possible radiation yield. Photovoltaic and flattened layer systems are known as solar cells. [0003] In all cases, solar cells contain semiconductor materials. Solar cells that require a carrier substrate in order to provide sufficient mechanical strength are referred to as thin-film solar cells. Due to physical characteristics and technical processin...

AI Technical Summary

Problems solved by technology

Discontinuous batch operation of stack furnaces can only be poorly integrated into the overall manufacturing process of solar cells or solar modules in large-scale technical production, which is often based on the in-line principle

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