A silicon-based niobium nitride thin film superconducting material and its manufacturing method
A production method and technology of superconducting materials, applied in the manufacture/processing of superconductor devices, superconductor parts, metal material coating technology, etc., can solve the gap in superconducting performance, reduce the superconducting performance of NbN thin films, and crystal structure Problems such as large lattice mismatch
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[0028] As mentioned in the background technology, the existing Si-based NbN thin-film superconducting materials still lack suitable transition layer materials, and it is impossible to obtain thin-film superconducting materials with good lattice matching between Si crystal and NbN layer and excellent superconducting properties. To a certain extent, the application field of Si-based NbN thin film superconducting materials is limited.
[0029] Therefore, the present invention proposes a new Si-based NbN thin film superconducting material. The Si-based NbN thin film superconducting material uses TiN as a transition layer. Since TiN and NbN both belong to the face-centered cubic structure, and the lattice mismatch is small, Therefore, the use of the TiN transition layer greatly reduces the thickness of the interfacial distortion layer in the NbN film, while the crystallinity of NbN is improved; and NbTiN itself is a T c For higher superconducting materials, even if the two elements...
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