Single-layer film reflective planar metal grating and manufacturing method thereof
The technology of a metal grating and a manufacturing method is applied in the field of optical metrology based on interference fringes, which can solve the problems of complex manufacturing process, poor line firmness, low signal contrast, etc., and achieve the effects of simple manufacturing method, good firmness and large signal contrast.
Inactive Publication Date: 2016-04-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0006] In order to solve the technical problems of the reflective metal grating in the prior art, such as low signal contrast, poor line firmness, inability to engineer, complex manufacturing process, and high cost, the present invention provides a single-layer film reflective planar metal grating and its manufacturing method
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Embodiment 1
[0053] Manufacturing method of single-layer reflective planar metal grating:
[0054] a. The cleaned metal substrate 1 is vacuum-deposited in a vacuum coating machine with a thickness of 2 μm chromium film 2;
[0055] b. Coating BP212 positive photoresist with a thickness of 1 μm on the surface of the chromium film 2, and drying at 90° C. for 30 minutes to obtain a photoresist layer 3;
[0056] c. Place the photoresist layer 3 on the grating master, expose it with a high-pressure mercury lamp for 3 minutes, develop it in NaOH lye for 30 seconds, and then dry it at 120°C for 20 minutes;
[0057] d. After exposure and development, the chromium film 2 without the protection of the photoresist layer 3 is wet-etched in ceric sulfate for 10 minutes to obtain a non-reflective layer 4;
[0058] e. Perform deglue treatment on the chromium film 2 protected by the photoresist layer 3 to obtain a reflective layer 5, clean the metal base 1, and obtain a single-layer reflective planar metal ...
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Abstract
The invention provides a single-layer film reflective plane metal grating and a manufacturing method thereof, belongs to the field of optical metrology based on interferometric fringe, and solves the technical problem that the prior reflective metal grating is low in signal contrast, poor in fringe firmness, unable to be engineered, complex in manufacturing process and high in cost. The single-layer film reflective plane metal grating comprises a metal substrate, a nonreflecting layer and a reflecting layer, wherein the nonreflecting layer and the reflecting layer are both chromium films coated on the metal substrate, and the nonreflecting film is thinner than the reflecting layer. The invention further provides the manufacturing method of the single-layer film reflective plane metal grating. The grating with the single-layer film is thin (not larger than 10 micrometers) in fringe, large (larger than 2:1) in signal contrast, easy to engineer, simple to manufacture and low in cost, and the nonreflecting layer and the reflecting layer are well firmed.
Description
technical field [0001] The invention relates to a single-layer film reflective plane metal grating and a manufacturing method thereof, belonging to the field of optical measurement based on interference fringes. Background technique [0002] Most of the existing metrology gratings are made of glass, and they are all transmissive. Due to the limitation of the manufacturing method, the line width of the transmissive metal grating is inversely proportional to the thickness of the substrate, so it is impossible to make a thick substrate (>0.5mm) The transmissive metal grating with thinner lines (40μm) cannot work in harsh environments with high shock and vibration. To this end, Germany's Heidenhain and Britain's Renishaw produced reflective metal gratings. [0003] There are two main manufacturing methods of existing reflective metal gratings. The first one adopts a process flow of aluminizing—waxing—scribing—painting—scribing—removing film—corrosion. In this method, aluminu...
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IPC IPC(8): G02B5/18G03F7/00G03F7/20
Inventor 陈赟王显军李艳茹张胜红陈宝刚
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI