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Method for producing a connection between two ceramic parts, in particular parts of a pressure sensor, and a ceramic product, in particular a ceramic pressure sensor

A technology of pressure sensors and connectors, applied in the direction of measuring fluid pressure through electromagnetic components, measuring fluid pressure through mechanical components, and connecting

Inactive Publication Date: 2013-07-03
EHNDRESS KHAUZER GMBKH KO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, in the case of ceramic pressure sensors with capacitive transducers, the miniaturization leads to a reduction in the electrode area of ​​the capacitive transducer, which must then be compensated by a reduction in the distance

Method used

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  • Method for producing a connection between two ceramic parts, in particular parts of a pressure sensor, and a ceramic product, in particular a ceramic pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0031] figure 1 The components of the ceramic pressure sensor 1 shown in , consist of a circular disc-shaped measuring membrane 2 and a circular disc-shaped platform 3, both of which are corundum. Specifically, the measuring membrane may be high-purity corundum with a purity greater than 99.98%. Depending on the embodiment, the measuring membrane 1 and the platform 2 have eg a diameter of eg 15 to 25 mm. However, the diameter is not an essential variable of the invention and may be chosen depending on eg metrological requirements or other boundary conditions. The measuring membrane 1 and the platform 2 are connected in a pressure-resistant and airtight manner through Zr-Ni-Ti-active hard solder or active brazing material during high-vacuum welding.

[0032] To this end, in each case, the end faces of the measuring membrane 1 and the platform 2 to be joined are first masked, except for the annular edge region, in order to then produce by vapor deposition an active hard solder...

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PUM

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Abstract

The invention relates to a method for producing a connection between two ceramic parts, having the following steps: providing a first ceramic part and a second ceramic part; providing an active brazing material on at least one surface section of at least one of the ceramic parts; and heating the active brazing material in a vacuum brazing process. According to the invention, the entire active brazing material for connecting the first and second ceramic part is provided in such manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated with the active brazing alloy by means of a vapor deposition.

Description

technical field [0001] The invention relates to a method for producing a connection between two ceramic parts, in particular pressure sensor parts, and a ceramic product, in particular a ceramic pressure sensor. Background technique [0002] Ceramic pressure sensors include a platform and a measuring membrane, wherein the measuring membrane is bonded to the platform by active hard solder or active brazing. A suitable active brazing or active brazing material for joining ceramic components of corundum is, for example, a Zr—Ni—Ti alloy, since this alloy has a coefficient of thermal expansion compatible with that of corundum. [0003] European patent EP0490807B1 discloses such active brazing or active brazing materials. Patent EP0558874B1 discloses a method for producing such active brazed or brazed rings. A ring of active hard solder or active brazing material used to connect the measuring membrane and the platform is placed between the two parts as a space holder and melted...

Claims

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Application Information

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IPC IPC(8): C04B37/00B23K35/02B23K35/32C23C14/34
CPCB23K35/0222B23K35/32C04B37/006C04B2235/6581C04B2235/72C04B2237/122C04B2237/127C04B2237/128C04B2237/343C04B2237/592C04B2237/60C04B2237/708B23K1/0008B23K1/008B23K1/19G01L9/0075G01L7/00H01R43/0235
Inventor 安德烈亚斯·罗斯贝格迈克尔·菲利普斯弗兰克·黑格纳武尔费特·德鲁斯约尔格·穆勒马可·多姆斯
Owner EHNDRESS KHAUZER GMBKH KO KG