Wafer temporary storage clamping case
A wafer and cassette technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as wafer cracking and damage, and achieve the effect of reducing malfunctions
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[0060] figure 1 It is a three-dimensional schematic diagram of a temporary wafer storage cassette according to an embodiment of the present invention. Figure 2A draw figure 1 A three-dimensional schematic diagram of the hook of the rotatable stopper not located in the slot of the second support block. Figure 2B draw figure 1 The three-dimensional partial schematic diagram of the rod part of the rotatable stopper not being buckled on the fastening part of the top plate. Figure 2C draw figure 1 A three-dimensional schematic diagram of the hook of the rotatable stopper being located in the slot of the second support block. For the sake of illustration, figure 1 Some components are omitted from illustration. Please refer to figure 1 , in this embodiment, the temporary wafer storage cassette 100 a includes a top plate 110 , a bottom plate 120 , a plurality of side plates 130 a , 130 b , 130 c and a rotatable stopper 140 .
[0061] For details, please also refer to Figu...
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