General test system for broadband silicon substrate detector spectral response
A technology for spectral response and general testing, applied in the field of general testing systems for spectral response of broadband silicon-based detectors, can solve problems such as non-response, and achieve the effect of ensuring accuracy and avoiding inhomogeneity
Inactive Publication Date: 2013-08-21
UNIV OF SHANGHAI FOR SCI & TECH
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Problems solved by technology
Leads to extreme cases where silicon-based detectors, especially CCD detectors, are oversaturated and unresponsive
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[0010] Such as figure 1 The schematic diagram of the general test system structure for the spectral response of a wide-band silicon-based detector is shown. A combination of two light sources, a deuterium lamp and a xenon lamp, or a single laser-excited ion light source is selected as the light source part 1, and the wavelength range covers 190nm to 1000nm.
[0011] Connect the light source to the monochromator, and the monochromator 2 adopts multi-level grating to split the light to ensure that the blazing wavelength is in the deep ultraviolet band; a set of filter wheels 13 is placed at the light inlet of the monochromator to eliminate incident stray light.
[0012] A set of collimating and constricting quartz lenses 3 is installed behind the exit slit of the monochromator 2, so that the optical signal including ultraviolet light is uniformly and completely received by the CCD pixel.
[0013] A set of energy attenuation wheel 4 is installed behind the quartz lens 3, and a se...
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The invention relates to a general test system for broadband silicon substrate detector spectral response. A light source is connected with a monochrometer, a set of filter wheels are arranged on a light incoming opening of the monochrometer, a set of collimation beam contracting quartz lenses are arranged behind an outgoing slot of the monochrometer, a set of energy decrement rotating wheels are arranged behind the quartz lenses, a standard detector and a CCD driver board are fixedly arranged on a three-dimensional stepping motor platform and then arranged in a dark room, the standard detector and the CCD driver board respectively receive light signals from the monochrometer, the light signals are further sent to an industrial personal computer to be processed through an image collecting card and a picoammeter, the stepping motor platform enables the standard detector to be capable of being coaxially changed over with the CCD driver board, and the output of the industrial personal computer controls a stepping driver, the monochrometer and the energy decrement rotating wheels. The energy decrement rotating wheels are used between the monochrometer and the detector to achieve control over energy of incident light of different wave bands, unevenness of the energy of the light source in the whole wave band is effectively avoided, and therefore accuracy of measurement of the broadband spectral response and accuracy of measurement of quantum efficiency are ensured.
Description
technical field [0001] The invention relates to a test system for spectral response, in particular to a general test system for spectral response of a wide-band silicon-based detector. Background technique [0002] Regarding the measurement of CCD chip performance parameters, there are currently two foreign standards: (1) ESA / SCC Basic Specification No.25000 standard. This standard was proposed by European Space Agency (ESA) in 1993. It mainly includes the definition of each parameter, testing equipment, electrical-optical testing principles, methods and conditions. (2) EMVA1288 standard. This standard was formulated and perfected by the European Machine Vision Association (EMVA), and is mainly aimed at the performance parameter calibration of image sensors and cameras in the field of machine vision applications. The EMVA1288 standard has established a set of standardized measurement methods, which is convenient for users to compare and optimize product performance. At p...
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IPC IPC(8): G01M11/02
Inventor 陶春先何梁张大伟卢忠荣洪瑞金黄元申
Owner UNIV OF SHANGHAI FOR SCI & TECH