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Method and device for measuring signal line inclination angle

A measurement method and a technology of a measurement device, which are applied in the direction of measurement devices, optical devices, nonlinear optics, etc., can solve the problems of large errors in signal line inclination angle measurement methods, cumbersome processes, and low efficiency, so as to improve yield and process Concise, small error effect

Active Publication Date: 2015-12-23
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] An object of the present invention is to provide a method and device for measuring the inclination angle of signal lines to solve the technical problems of large error, low efficiency and cumbersome process in the prior art for measuring the inclination angle of signal lines

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  • Method and device for measuring signal line inclination angle
  • Method and device for measuring signal line inclination angle
  • Method and device for measuring signal line inclination angle

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Embodiment Construction

[0027] The description of the following embodiments refers to the attached drawings to illustrate specific embodiments that the present invention can be implemented. The directional terms mentioned in the present invention, such as "up", "down", "front", "rear", "left", "right", "inner", "outer", "side", etc., are for reference only The direction of the additional schema. Therefore, the directional terms used are used to describe and understand the present invention, rather than to limit the present invention. In the figures, units with similar structures are indicated by the same reference numerals.

[0028] See figure 2 , figure 2 It is a schematic flowchart of a method for measuring a signal line inclination angle in an embodiment of the present invention.

[0029] In step S201, the substrate to be measured is set on the carrier platform.

[0030] For example, see Figure 3A , Figure 3A Is a cross-sectional view of the substrate to be tested. The substrate 30 to be tested i...

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Abstract

A method for measuring an inclined angle of a signal line comprises: controlling a light source (40) to rotate and emit light to radiate an outer side surface (322) of a signal line (32), and in the rotation of the light source (40), obtaining a rotation angle of the light source (40) and a light intensity corresponding to the rotation angle in real time; and obtaining a rotation angle corresponding to a maximum value of the light intensity, and generating an inclined angle of the signal line according to the rotation angle corresponding to the maximum value of the light intensity. Also provided is an apparatus for measuring an inclined angle of a signal line. By using the method and the apparatus, an inclined angle of a signal line can be accurately measured, and the inclined angle of the signal line can be measured in a case in which a substrate to be measured does not need to be cut.

Description

【Technical Field】 [0001] The invention relates to the technical field of display production, in particular to a method and device for measuring the tilt angle of a signal line. 【Background technique】 [0002] With the continuous popularization of thin film transistor liquid crystal displays (ThinFilmTransistorLiquidCrystalDisplay, TFT-LCD), high requirements are put forward for the production efficiency of TFT-LCD. [0003] The TFT-LCD includes an upper glass substrate (such as an Array substrate) and a lower glass substrate (such as a CF substrate). The upper glass substrate and the lower glass substrate include a liquid crystal layer, and the liquid crystal layer includes liquid crystal molecules. The main body of the TFT-LCD thin film production process includes the processes of film formation, cleaning, photoresist coating, exposure, development, drying, etching, photoresist removal, and detection, so as to form signal lines on the glass substrate, and finally through multiple ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13G01B11/26
CPCG01B11/26G02F1/1309G02F1/136286
Inventor 郑文达
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD