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Thin film forming device for solar cell and thin film forming method

A technology of solar cells and thin films, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as poor film characteristics and poor liquid crystallinity

Inactive Publication Date: 2013-09-18
UNIVERSITY OF YAMANASHI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the semiconductor thin film formed only by the film-forming method by spray coating or the film-forming method by coating as described above has the problem that the film properties are not good because the liquid crystallinity is not so good.

Method used

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  • Thin film forming device for solar cell and thin film forming method
  • Thin film forming device for solar cell and thin film forming method
  • Thin film forming device for solar cell and thin film forming method

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no. 1 Embodiment ＞

[0030] Such as figure 1 As shown, the first embodiment of the thin film forming apparatus 2 has a box-shaped processing container 4 . Among them, when the film formation process of the thin film forming method of the present invention is performed in an atmospheric pressure atmosphere, it is not necessary to install the above-mentioned processing container 4, but it is preferable to install the processing container 4 in order to remove intruded particles and the like. When the film formation process is performed in an atmospheric pressure atmosphere, the processing container 4 may be made of a material with low pressure resistance such as a thin resin plate made of plastic or a thin metal plate such as an aluminum plate or an aluminum alloy plate. On the other hand, when the film formation process is performed in a reduced-pressure atmosphere (vacuum atmosphere), the processing container 4 is made of a material with sufficient pressure resistance such as a thick resin plate, a...

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Abstract

This thin film forming method for a solar cell forms a thin film that contains a plurality of elements on the surface of an object being processed. A starting material solution that contains the elements is dispersed in a processing space as microparticles by an electric field, and the microparticles that are dispersed form a thin film that adheres to the surface of the object being processed. Thus, a thin film for a solar cell element with excellent crystallinity can be formed even in an atmosphere at atmospheric pressure.

Description

technical field [0001] The present invention relates to a solar cell thin film forming apparatus and a thin film forming method for forming a thin film used in a photoelectric conversion element such as a solar cell. Background technique [0002] In general, photoelectric conversion elements such as solar cells utilize the energy conversion characteristics of semiconductors, and solar cells in particular have attracted attention as a means of obtaining electric energy without adversely affecting the global environment. This type of photoelectric conversion element is formed by laminating multiple layers of various thin films for photoelectric conversion, such as p-type semiconductor thin films and n-type semiconductor thin films, on the surface of a silicon substrate or the like using a vacuum film-forming device such as a CVD (Chemical Vapor Deposition) device. . [0003] When using a vacuum film forming apparatus, the film quality of the obtained thin film is relatively g...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/368H01L31/04
CPCC23C24/02H01L21/02543H01L21/02546H01L21/02557H01L21/02562H01L21/02568H01L21/02601H01L21/02628H01L31/0322H01L31/0326H01L31/03923H01L31/03925H01L31/18H01L31/1828H01L31/20Y02E10/541Y02E10/543H01L21/34H01L31/04H01L21/02617
Inventor 加藤孝正成岛正树原谦一
Owner UNIVERSITY OF YAMANASHI