XY workbench

Abstract

The invention provides an XY workbench which is provided with an X-axis linear motor and a Y-axis linear motor. The X-axis linear motor and the Y-axis linear motor are provided with coil parts and magnet yoke parts, wherein the coil parts are used as moving parts and composed of triphase coils, and the magnet yoke parts are used as fixing parts. Opening parts are arranged on the upper portions and the lower portions of the magnet yoke parts relative to the center line of the length direction, a plurality of permanent magnets are alternatively arrayed on the upper surfaces of the opening parts on the upper portions and the lower surfaces of the opening parts on the lower portions in the mode that the surfaces of the permanent magnets form an N pole and an S pole. Permanent magnets on the opening parts of the upper portions of the magnet yoke parts and permanent magnets of the opening parts on the lower portions of the magnet yoke parts in the vertical direction are arrayed in a homopolar mode, the triphase coils are inserted in a magnet yoke close to the center, the magnet yoke parts are fixed on a base through a magnet yoke part guiding piece which can move in the same axial direction as the coil parts and are formed in the mode that the counter-acting force in moving process of the coil parts is absorbed, and the X-axis linear motor is arranged on the lower portion of the moving workbench.

Description

technical field [0001] The present invention relates to an XY table that reduces vibration during driving and can be miniaturized, and particularly relates to an XY table suitable for semiconductor manufacturing equipment. Background technique [0002] In semiconductor manufacturing equipment such as a wiring machine, an XY table for positioning a bonding head having a bonding head in the XY axis direction is used. Patent Document 1 discloses an XY stage capable of preventing vibration due to high-speed movement. The XY table disclosed in Patent Document 1 has X-axis and Y-axis linear motors for adjusting the position of the center of gravity of the movable part composed of the movable table and the working member. The height position applies driving forces in the X direction and the Y direction to the movable table respectively. The linear motors of the X-axis and Y-axis are directly connected to the movable table, and when the movable part is driven by the linear motor, ...

AI Technical Summary

Problems solved by technology

However, there is a limit to the length of the magnet that can be manufactured, so the movable range of the movable table is limited by the length of the magnet

In addition, there is a problem that it is difficult to form a stable magnetic field for the coil, especially the thrust force is lowered at both ends of the magnet

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