Anti-PID effect solar cells and manufacturing method thereof
A technology for solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve problems such as increasing the production cost of solar cells, and achieve the goal of eliminating PID effects, reducing production costs, and improving minority carrier life. Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment
[0018] Such as figure 1 As shown, the solar cell of the present invention includes a crystalline silicon substrate 1 , and a passivation layer 2 , a light-transmitting layer 3 and an anti-PID effect layer 4 sequentially deposited on the crystalline silicon substrate. The preparation process is carried out on the tubular direct method silicon nitride coating equipment, which specifically includes the following steps:
[0019] Step 1, preheating, the crystalline silicon substrate enters the reaction chamber and is heated at a constant temperature to reach the set reaction temperature, and the temperature is set at 450°C;
[0020] Step 2, constant pressure, filling the reaction chamber with reaction gas NH 3 and SiH 4 , SiH 4 Flow 780sccm / min, NH 3 Flow rate 3500sccm / min, pressure range 1.7Torr;
[0021] Step 3, passivation layer deposition, the radio frequency power is turned on, the radio frequency power is 7000W, at the reaction temperature, the active radicals in the pla...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 