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Vibrator element, vibration device and electronic apparatus

A technology for electronic equipment and vibration devices, applied to measuring devices, gyroscopes/steering sensing devices, circuits, etc., can solve problems such as not necessarily high adhesion, peeling of the upper electrode layer, and reduced reliability

Inactive Publication Date: 2013-10-23
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in such a conventional angular velocity sensor, when conducting with other components by wire bonding, it is necessary to fix the bonding wire to the upper electrode layer above the piezoelectric layer.
At this time, since the adhesiveness between the piezoelectric layer and the upper electrode layer is not necessarily high, there is a problem that the upper electrode layer is peeled off or the reliability is lowered.

Method used

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  • Vibrator element, vibration device and electronic apparatus
  • Vibrator element, vibration device and electronic apparatus
  • Vibrator element, vibration device and electronic apparatus

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0070] First, the first embodiment of the present invention will be described.

[0071] figure 1 Is a schematic cross-sectional view showing the schematic structure of the sensor device (vibration device) according to the first embodiment of the present invention, figure 2 for, figure 1 The top view of the sensor device shown, image 3 for, figure 1 A plan view of the sensor element (vibration plate) included in the sensor device shown, Figure 4 for, image 3 A-A line cross-sectional view in Figure 5 (a) is, image 3 Sectional view of line B-B in, Figure 5 (b) is, image 3 Sectional view of line C-C in.

[0072] In addition, in the following, for convenience of explanation, Figure 1 ~ Figure 5 In the figure, the x-axis, y-axis, and z-axis are shown as three axes orthogonal to each other, and the tip side of the arrow mark in the figure is set to "+ side" and the base end side is set to "- side" . In addition, the direction parallel to the x-axis is called the "x-axis direction...

no. 2 approach

[0236] Next, a second embodiment of the present invention will be described.

[0237] Figure 8 It is a diagram for explaining the sensor element (vibrating element) according to the second embodiment of the present invention.

[0238] The sensor element according to this embodiment is the same as the sensor element according to the first embodiment described above, except for the difference in the configuration related to the wiring of the drive unit and the detection unit.

[0239] In addition, in the following description, regarding the sensor element of the second embodiment, the difference from the embodiment described above will be mainly described, and the description of the same matters will be omitted. In addition, in Figure 8 Here, the same symbols are attached to the same structures as in the above-mentioned embodiment. In addition, Figure 8 (a) is, and Figure 5 (a) The corresponding cross-sectional view, Figure 8 (b) is, and Figure 5 (b) Corresponding sectional view...

no. 3 approach

[0253] Next, a third embodiment of the present invention will be described.

[0254] Picture 9 It is a diagram for explaining the sensor element (vibrating element) according to the third embodiment of the present invention.

[0255] The sensor element according to this embodiment is the same as the sensor element according to the first embodiment described above, except for the difference in the configuration related to the wiring of the drive unit and the detection unit.

[0256] In addition, in the following description, regarding the sensor element of the third embodiment, the difference from the above-mentioned embodiment will be mainly described, and the description of the same matters will be omitted. In addition, in Picture 9 Here, the same symbols are attached to the same structures as in the above-mentioned embodiment. In addition, Picture 9 (a) is, and Figure 5 (a) The corresponding cross-sectional view, Picture 9 (b) is, and Figure 5 (b) Corresponding sectional vie...

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Abstract

The invention provides a vibrator element and a vibration device capable of being made at a high yield and having high reliability, and an electronic apparatus including such a vibration device that has high reliability. A sensor element (a vibrator element) includes a base portion (21); a vibrating arm (22) extended from the base portion (21); a drive unit (51) that is provided in the vibrating arm (22) and has a first electrode layer (511), a second electrode layer (513), and a piezoelectric body layer (512); a wiring (62) having a portion that is drawn from the second electrode layer (513) and is provided along a side surface of the piezoelectric body layer (512); and a terminal that is provided in the base portion (21) and is electrically connected to the second electrode layer (513) via the wiring (62).

Description

Technical field [0001] The invention relates to a vibrating plate, a vibrating device and electronic equipment. Background technique [0002] Sensor elements that detect physical quantities such as angular velocity and acceleration are used, for example, for vehicle body control in vehicles, vehicle position detection in car navigation systems, and vibration control compensation for digital cameras or video cameras (so-called shake compensation). As the sensor element involved, for example, a vibrating gyro sensor (angular velocity sensor) is known (for example, refer to Patent Document 1). [0003] For example, the angular velocity sensor described in Patent Document 1 includes a tuning-fork-shaped substrate having two arm portions, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer are sequentially stacked on each arm portion. In addition, in the angular velocity sensor described in Patent Document 1, a part of the upper electrode layer is separated...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5607H10N30/87H10N30/88
CPCG01C19/5628H01L41/0475H01L41/0472G01C19/5621H01L41/0533H10N30/875H10N30/872H10N30/883
Inventor 舟川刚夫
Owner SEIKO EPSON CORP