Physical quantity sensor and manufacturing method thereof, and electronic device
A technology of physical quantity sensor and manufacturing method, which is applied in welding equipment, manufacturing tools, optical mechanical equipment, etc., and can solve problems such as lower yield
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 approach
[0054] 1.1. Physical quantity sensor
[0055] First, a physical quantity sensor according to a first embodiment will be described with reference to the drawings. figure 1 It is a plan view schematically showing the physical quantity sensor 100 according to the first embodiment. figure 2 In order to schematically represent the physical quantity sensor 100 according to the first embodiment, the figure 1 The sectional view of the line II-II. Also, for the sake of illustration, in figure 1 In , the illustration of the cover body 50 is omitted. In addition, in figure 1 as well as figure 2 In FIG. 3 , an X axis, a Y axis, and a Z axis are shown as three axes orthogonal to each other.
[0056] The physical quantity sensor 100 can be used, for example, as an inertial sensor, specifically, as an acceleration sensor (capacitance type acceleration sensor, capacitance type MEMS acceleration sensor) for measuring acceleration in the vertical direction (Z-axis direction). ) and use...
no. 2 approach
[0109] 2.1. Physical quantity sensor
[0110] Next, a physical quantity sensor according to a second embodiment will be described with reference to the drawings. Figure 6 It is a plan view schematically showing the physical quantity sensor 200 according to the second embodiment. Figure 7 In order to schematically show the physical quantity sensor 200 according to the second embodiment, along Figure 6 Sectional view of line VII-VII in. Also, for the sake of illustration, in Figure 6 In , the illustration of the cover body 50 is omitted. In addition, in Figure 6 as well as Figure 7 In FIG. 3 , an X axis, a Y axis, and a Z axis are shown as three axes orthogonal to each other.
[0111] Hereinafter, in the physical quantity sensor 200 according to the second embodiment, components having the same functions as those of the physical quantity sensor 100 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof will be o...
no. 3 approach
[0152] Next, an electronic device according to a third embodiment will be described with reference to the drawings. An electronic device according to a third embodiment includes the physical quantity sensor according to the present invention. Hereinafter, an electronic device including the physical quantity sensor 100 as the physical quantity sensor according to the invention will be described.
[0153] Figure 11 It is a perspective view schematically showing a portable (or notebook) personal computer 1100 as the electronic device according to the third embodiment.
[0154] Such as Figure 11 As shown, a personal computer 1100 is composed of a main body 1104 including a keyboard 1102, and a display unit 1106 having a display 1108, and the display unit 1106 is rotatably supported relative to the main body 1104 by a hinge structure.
[0155] Such a personal computer 1100 incorporates the physical quantity sensor 100 .
[0156] Figure 12 It is a perspective view schematica...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More