Adjusting device and method for grating scribing knife

Abstract

An adjusting device for a grating ruling knife and a method thereof belong to the field of automatic mechanical control of grating ruling and aims to achieve high-precision and high-performance grating ruling. Piezoceramics is arranged on a bearing seat, a knife rest positioning and mounting head is connected with the output terminal of the piezoceramics, a knife rest is positioned below the knife rest positioning and mounting head, a measuring device is fixed on the bearing seat, n confining force mechanisms are arranged between the bearing seat and the knife rest positioning and mounting head, a knife lifting and setting mechanism is mounted on the knife rest positioning and mounting head to realize lifting and setting of the knife rest, and the piezoceramics and the measuring device are connected with a data acquisition control module which is used for controlling the piezoceramics to control the knife rest positioning and mounting head to be subjected to displacement so as to adjust operation errors of the knife rest. The piezoceramics is lighter in loading mass when actuating micro-positioning, so that the dynamic bandwidth adjustment and the dynamic accuracy are improved, the error between the diamond ruling knife and a grating base is reduced and high-precision and high-performance grating ruling is realized.

Description

technical field [0001] The invention belongs to the field of automatic control of grating scribing machines, in particular to a grating scribing knife adjustment device and method for adjusting the running error of the grating scribing knife. Background technique [0002] The main principle of grating scribing is to use a diamond knife to extrude a series of equally spaced grooves with microstructures on the grating substrate coated with aluminum or gold on the surface. The consistency of the spacing between any two adjacent grooves, and the consistency of the spacing between adjacent grooves at different positions along the groove direction directly determine the performance indicators of the ruled grating, such as wavefront quality, ghost line intensity, and stray light intensity. Therefore, the production of high-performance ruled gratings requires high positioning accuracy between the diamond burr and the grating substrate. [0003] In the prior art, the photoelectric c...

AI Technical Summary

Problems solved by technology

[0003] In the prior art, the photoelectric control type grating marking machine uses a measuring device with high precision to measure the real-time error between the workbench carrying the grating substrate in the indexing system and the composite tool holder equipped with a diamond carving knife in the marking system, and Use the workbench to compensate the error online, so as to improve the positioning accuracy of the diamond cutter relative to the grating substrate; in the marking process, generally use a workbench with micro-positioning function and high resolution and precision to compensate for machining and running accuracy. Groove error; when the size of the grating increases, the size and load capacity of the workbench carrying the grating substrate must increase, and the large-size, heavy-duty workbench is difficult to achieve high-resolution and high-precision micro-positioning control, and it is also difficult to quickly Dynamically compensate the error between the diamond cutter and the grating substrate generated during the operation of the marking machine, which is not conducive to the engraving of high-precision and high-performance gratings

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