A kind of preparation method of boron carbide-silicon carbide composite coating
A composite coating, boron carbide technology, applied in coating, metal material coating process, melt spraying and other directions, can solve the problem of the coarse and loose structure of boron carbide coating, high resistance to grain boundary movement, and hinder the application of boron carbide coating. and other problems, to achieve excellent corrosion resistance and physical and mechanical properties, improve oxidation resistance and high temperature performance.
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[0021] Such as figure 1 Shown, the present invention provides a kind of preparation method of boron carbide-silicon carbide composite coating, comprises the steps:
[0022] Step (1), mixing boron carbide powder and silicon carbide powder evenly, and sending the mixed powder into plasma spraying equipment;
[0023] Step (2), use acetone or alcohol to clean the surface of the substrate to be sprayed;
[0024] Step (3), sandblasting the surface of the cleaned substrate;
[0025] In step (4), a boron carbide-silicon carbide composite coating is prepared by plasma spraying on the surface of the substrate by means of plasma spraying equipment.
Embodiment 1
[0028] This embodiment provides a method for preparing a boron carbide-silicon carbide composite coating, which is suitable for the anti-corrosion treatment of the inner surface of the ICP etching process chamber in semiconductor equipment. The substrate to be sprayed is the inner wall of the etching process chamber. Specifically include the following steps:
[0029] (1) Mix 99 parts by weight of boron carbide powder and 1 part by weight of silicon carbide powder evenly, the particle size range of boron carbide powder and silicon carbide powder is 5-40 μm, and send the mixed powder into the plasma spraying equipment;
[0030] (2) Cover the part of the etching process chamber of the aluminum substrate to be sprayed that does not need to be sprayed, and then use acetone or alcohol to clean the inner wall of the etching process chamber;
[0031] (3) Sandblasting the part of the inner wall of the etching process chamber that needs to be sprayed;
[0032] (4) Plasma spraying with ...
Embodiment 2
[0034] This embodiment provides a method for preparing a boron carbide-silicon carbide composite coating, which is suitable for bulletproof armor ceramics. In this embodiment, 95 parts by weight of boron carbide powder and 5 parts by weight of silicon carbide powder are mixed evenly, and carbonized The particle size range of boron powder and silicon carbide powder is 5-40μm, and the mixed powder is sent to the plasma spraying equipment, and then the surface of the substrate to be sprayed is cleaned with acetone or alcohol, and the cleaned substrate surface is sandblasted deal with. Other steps in this embodiment and the process parameters of the plasma spraying equipment are the same as those in Embodiment 1.
[0035] The present invention adds a small amount of silicon carbide powder into the boron carbide powder for spraying, and stirs the mixed powder at a certain speed during the spraying process, so that the B 4 The C powder and the SiC powder are uniformly mixed. Since...
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