Moving-iron cableless six-freedom-of-degree magnetic levitation moving platform

[0022] figure 1 , figure 2 A three-dimensional structure diagram of a moving iron-type cable-free six-degree-of-freedom maglev motion platform provided for the invention. The moving iron-type cable-free six-degree-of-freedom maglev motion platform includes a base 1, a stator, a mover, and a carrier. Table 2 and a measuring system, the mover is composed of a halbach permanent magnet array 13 and a magnetic steel back plate 4; the stator is a coil array 14 formed by multiple sets of coil units 9; the measuring system It includes a laser interferometer measurement system 12, an eddy current sensor 11 and a laser triangle sensor 15. A three-axis gyroscope 5 and a three-axis accelerometer are also provided in the groove between the mover and the stage 2 6. A power supply module 7 and a wireless signal output module 19; a wireless signal receiving module 20 is provided on the stator, the three-axis gyroscope 5, the three-axis accelerometer 6 and the power supply module 7, and the wireless signal output module 19 Integrated on a circuit board 8, such as figure 2 with image 3 As shown; the three-axis gyroscope 5 can respectively measure the angle of the mover around the X-axis, Y-axis and Z-axis; the three-axis accelerometer 6 can respectively measure the mover along the X-axis, Y-axis and Z The linear acceleration of the axis; the measurement signals of the three-axis gyroscope 5 and the three-axis accelerometer 6 communicate wirelessly with the wireless signal receiving module 20 arranged on the stator through the wireless signal output module 19; The eddy current sensors 11 are arranged in an array in the gap between the coil units 9 of the stator, and the probe of the eddy current sensor 11 is placed vertically upward; three laser triangulation sensors 15 are provided at one corner of the stator, among which There are two laser triangle sensors 15 along the X direction, and one laser triangle sensor 15 along the Y direction. The three laser triangle sensors together with the eddy current sensor 11 are the three-axis gyroscope 5 and the three-axis acceleration Calculate 6 for calibration of six degrees of freedom.

[0023] The coil array 14 is formed by multiple groups of coil units 9 arranged along the X direction and the Y direction, each group of coil units includes at least 3 square coils, and two adjacent groups of coil units are arranged orthogonally.

[0024] Figure 5 shows several different structural forms adopted by the coil unit of the present invention, and a total of five are listed. The coil unit can adopt a stack of orthogonally wound coil groups (such as Figure 5a ), or use a single layer of rectangular coils arranged orthogonally from bottom to top to form a horizontal coil group (such as Figure 5b ), or a coil group with rectangular coils placed horizontally (such as Figure 5c ), or use rectangular coils to vertically place the coil group (such as Figure 5d ), or the use of laminated orthogonal printed PCB circuit coil groups (such as Figure 5e ); The number of each coil group is a multiple of three, and each coil is composed of an energized wire and a coil frame 10.

[0025] Figure 6 shows the structure of two permanent magnet arrays of the mover of the present invention. The permanent magnet array of the mover consists of a main permanent magnet and an attached permanent magnet 18. The main permanent magnet (the first main permanent magnet 16, the second main permanent magnet) The magnet 17) and the attached permanent magnet 18 are bonded and fixed on the surface of the magnetic steel back plate 4 in the form of a Halbach one-dimensional array or a two-dimensional planar array. The magnetic field directions of the adjacent main permanent magnet and the attached permanent magnet are perpendicular to each other. A closed magnetic circuit is formed between the permanent magnets.

[0026] The working process of the present invention is as follows:

[0027] The direction of the magnetic field generated by the permanent magnet array of the maglev platform, the direction of the current in the energized coil, and the direction of the Lorentz force generated are perpendicular to each other; each group of coil units can simultaneously be in two directions perpendicular to each other in the plane of the permanent magnet array, And provide thrust in the three degrees of freedom perpendicular to the plane direction of the permanent magnet array.

[0028] In this embodiment, as figure 1 As shown, first, the stator coil of the maglev motion platform is powered on. Since most of the sensors of the measurement system are incremental measurements, the sensor calibration is required at this time. The three laser triangulation sensors 15 arranged at one corner of the stator of the maglev platform and the eddy current sensor 11 on the coil array 14 are used to calibrate the zero position. There are two laser triangle sensors 15 along the X direction, which can measure the position of the mover of the maglev platform along the X direction and the inclination angle of rotation around the Z axis. A laser triangle sensor 15 is provided along the Y direction to measure the maglev movement. The position of the mover of the moving platform along the Y direction; the array of eddy current sensors 11 located on the coil array 14 can measure the position of the mover of the maglev moving platform along the Y direction, and the inclination angle of the mover around the X axis and the Y axis. After completing the above process, it can be determined that the maglev platform mover is located at the stator of the maglev platform. At the same time, the initial position of the three-axis gyroscope 5 and the three-axis accelerometer 6 installed on the maglev platform mover can be determined. Position, because the three-axis gyroscope 5 will drift after working for a period of time, so the above zero calibration process needs to be repeated continuously, such as Figure 4 Shown.

[0029] After the initial position calibration of the three-axis gyroscope 5 and the three-axis accelerometer 6 is completed, the laser interferometer measurement system 12 needs to be adjusted. First, the wireless signal output module 19 and the wireless signal receiving module 20 continuously notify the control system of the position signals of the three-axis gyroscope 5 and the three-axis accelerometer 6, and the measurement signal of the wireless signal transmission can be WIFI, Bluetooth or infrared. Through the control system, the position of the mover of the maglev platform in the magnetic field is continuously adjusted, and then the laser interferometer is adjusted to make it work normally within the allowable range. So far, the adjustment of the laser interferometer measurement system 12 is completed; in the maglev platform Under normal working conditions, the laser interferometer measuring system 12 is required for high-precision position measurement.

[0030] The power supply mode of the three-axis gyroscope 5 and the three-axis accelerometer 6 is to install a power module 7 on the circuit board 8. The power module 7 is a replaceable power module or a power module capable of wireless charging. When the maglev motion platform runs to the laser During the zero calibration process of the triangle sensor 15 and the eddy current sensor 11, a manipulator is used to replace the power module 7 or to wirelessly charge the power module 7. In summary, the maglev movement platform realizes a cable-free design.