Moving-iron cableless six-freedom-of-degree magnetic levitation moving platform

Abstract

The invention discloses a moving-iron cableless six-freedom-of-degree magnetic levitation moving platform. The magnetic levitation moving platform comprises a base, a stator, a rotor, a slide holder and a measurement system. According to the invention, a groove between the stator and the slide holder is internally provided with a three-axis gyroscope, a three-axis accelerator, a power supply module and a wireless signal output module, which are integrated to a circuit board; the stator is provided with a wireless signal receiving module; the angle of the rotor is measured by adopting the three-axis gyroscope; the linear displacement of the rotor is measured by the three-axis accelerator; the three-axis gyroscope and the three-axis accelerator are subjected to zero-position calibration by a laser triangle sensor and an electric eddy transducer, and a replaceable power supply module and a wireless signal transmission technique are adopted. Compared with the prior art, the moving-iron cableless six-freedom-of-degree magnetic levitation moving platform has the advantages that the rotor can rotate freely around a large angle in a horizontal plane by adopting the wireless transmission technique, a wireless power supply technique and a cableless design; the anti-interference capability of a work bench is improved greatly; the control band width of a control system is also improved.

Description

technical field [0001] The invention relates to a maglev workbench, in particular to a moving iron type cable-free six-degree-of-freedom maglev motion platform, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and testing equipment. Background technique [0002] The micro-motion table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system to achieve ultra-precision machining; in the manufacture of large-scale integrated circuits, the ultra-precision micro-motion table is used for micro-positioning in lithography equipment and micro-feeding; in the scanning probe microscope, the ultra-precise micro-motion table is used to measure the surfa...

AI Technical Summary

Problems solved by technology

[0006] Summarizing the current research status of nanoscale micro-motion worktables at home and abroad, in order to meet the requirements of high precision, high speed, large load, and high dynamic characteristics of extreme ultraviolet lithography equipment, although the silicon wafer stage technology using magnetic levitation planar motors can meet the requirements of lithography equipment However, when there is extreme ultraviolet lithography, some potting glue of the maglev planar motor will release some gas, which will have a certain impact on the light source, and there will be a large number of power supplies and sensor cables on the planar motor to interfere with the movement. , its performance is limited by

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