Moving-iron cableless six-freedom-of-degree magnetic levitation moving platform
A motion platform, degree of freedom technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as cable interference movement, light source influence, etc., achieve high-precision measurement, improve control bandwidth, and improve anti-interference ability Effect
Active Publication Date: 2014-01-29
TSINGHUA UNIV +1
5 Cites 10 Cited by
AI-Extracted Technical Summary
Problems solved by technology
View more
Abstract
The invention discloses a moving-iron cableless six-freedom-of-degree magnetic levitation moving platform. The magnetic levitation moving platform comprises a base, a stator, a rotor, a slide holder and a measurement system. According to the invention, a groove between the stator and the slide holder is internally provided with a three-axis gyroscope, a three-axis accelerator, a power supply module and a wireless signal output module, which are integrated to a circuit board; the stator is provided with a wireless signal receiving module; the angle of the rotor is measured by adopting the three-axis gyroscope; the linear displacement of the rotor is measured by the three-axis accelerator; the three-axis gyroscope and the three-axis accelerator are subjected to zero-position calibration by a laser triangle sensor and an electric eddy transducer, and a replaceable power supply module and a wireless signal transmission technique are adopted. Compared with the prior art, the moving-iron cableless six-freedom-of-degree magnetic levitation moving platform has the advantages that the rotor can rotate freely around a large angle in a horizontal plane by adopting the wireless transmission technique, a wireless power supply technique and a cableless design; the anti-interference capability of a work bench is improved greatly; the control band width of a control system is also improved.
Application Domain
Semiconductor/solid-state device manufacturingPhotomechanical exposure apparatus +1
Technology Topic
Linear displacementSix degrees of freedom +14
Image
Examples
- Experimental program(1)
Example Embodiment
PUM


Description & Claims & Application Information
We can also present the details of the Description, Claims and Application information to help users get a comprehensive understanding of the technical details of the patent, such as background art, summary of invention, brief description of drawings, description of embodiments, and other original content. On the other hand, users can also determine the specific scope of protection of the technology through the list of claims; as well as understand the changes in the life cycle of the technology with the presentation of the patent timeline. Login to view more.
Similar technology patents
Multi-station three-dimensional laser scanning internal measurement device and method for volume of vertical tank with large length-diameter ratio
ActiveCN112378473Ahigh precision measurementPoint cloud data with the same accuracy
Owner:HARBIN INST OF TECH
Sensing instrument
InactiveUS20100024532A1detect variation accuratelyhigh-precision measurement
Owner:NIHON DEMPA KOGYO CO LTD
Stereoscopic vision measurement method, system and equipment for large-size moving object and storage medium
Owner:XI AN JIAOTONG UNIV
Digital image measuring system
Owner:ENDIAN SCI & TECH DEV OF YUNNAN
Classification and recommendation of technical efficacy words
- high precision measurement
- Improve anti-interference ability
High-accuracy remote absolute displacement measurement system based on optical fiber composite interference
InactiveCN102564317Ahigh precision measurement
Owner:BEIJING JIAOTONG UNIV
Fiber bragg grating (FBG) testing device and testing method for rock three-dimensional stress state
Owner:HENAN POLYTECHNIC UNIV
Calibrating device for large-range continuous optical path delay line
Owner:HARBIN ENG UNIV
Ultraviolet temperature measuring method and apparatus for MOCVD epitaxial wafer surface temperature measurement
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA