Medium-high temperature solar photothermal selective-absorbing coat
A technology of absorbing coating and solar energy, applied in the field of solar thermal utilization, can solve the problems of easy diffusion and oxidation, decreased absorption performance, increased incidence, etc., and achieves high hardness and anti-oxidation characteristics, high temperature stability, good The effect of thermal stability
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[0034] combine figure 1 The coating profile layer shown, the coating preparation process is as follows: (1) Use a magnetron sputtering system, select 99.8% Ti target material, 99.99% Al 2 o 3 The target material; the substrate uses 316L stainless steel. Before the deposition starts, the background vacuum of the vacuum chamber is evacuated to 5×10-4Pa. (2) Fill in the working gas Ar, adjust the flow rate so that the vacuum degree is stable at the sputtering pressure of 0.5Pa, turn on the intermediate frequency power supply of the Ti target, adjust the sputtering current to 6.0A, the duty cycle to 50.0%, and the bias power supply to 70w , with a duty ratio of 30%, a 10nm metal Ti was prepared as a transition bonding layer. (3) Adjust N 2 The gas flow is 20sccm, and then by adjusting the Ar gas flow, the vacuum degree is set at 0.5Pa, the intermediate frequency power supply is turned on, the sputtering current is 10A, and the duty cycle is 50%. Similarly, the bias power suppl...
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