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A photolithographic 3D printer

A 3D printer and lithography technology, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of high energy consumption, slow printing speed, and high control precision requirements, so as to improve processing accuracy and speed up printing The effect of speed, optimized image quality

Inactive Publication Date: 2016-06-08
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

[0003] 3D printing with traditional methods has the following disadvantages: the control is complicated, the slight influence during printing will lead to the instability of droplets or particles, and each thin layer image is obtained by two-dimensional scanning, which requires high control accuracy; printing speed Slow, each thin-layer image needs two-dimensional scanning, the speed is slow; the precision is not high, the size of the droplet or particle is large, it is difficult to obtain a high-precision three-dimensional entity, and it is difficult to break through the bottleneck of precision; the energy consumption is large , requires heating or laser, which produces more energy consumption; air pollution, if the "laser sintering" method is used, it is inevitable that tiny particles will be emitted into the air during sintering, forming tiny suspended particles, reducing air quality

Method used

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  • A photolithographic 3D printer
  • A photolithographic 3D printer
  • A photolithographic 3D printer

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] Such as figure 1 As shown, the entire 3D printing system can be divided into five subsystems: light source system, image system, projection system, mechanical system, and electric control system. Described light source system is made up of LED light source 8, collimator 7 and beam expander mirror 6, and it sends multi-beam independent parallel light; The core component of described image system is DMD device 3, and it is controlled by computer, by adjusting each The reflective micromirror of the pixel is reflected to obtain a light beam with image information; the projection system is composed of a 4f system 5 and a plane mirror 9, which images the light beam to a fixed exposure surface to cure a layer of photoresist near the exposure surface , the mechanical system consists of a cup holder 10, a lithography cup 11, a printing substrate...

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Abstract

The invention discloses a lithographic 3D printer, which belongs to the technical field of lithography and includes five subsystems: a light source system, an image system, a projection system, a mechanical system, and an electric control system. The system obtains the 3D model data of the printed object, and decomposes it into thin layers with uniform thickness according to the height direction, and then uses the image system to generate the exposure graphics of each thin layer. The photoresist is cured, and the three-dimensional scanning is completed under the step-and-translation movement of the mechanical system clamping the cured photoresist to obtain a high-precision three-dimensional entity. The advantages of the present invention are: the system is different from traditional 3D printing, improves the accuracy and efficiency of precision printing, and has high reliability.

Description

technical field [0001] The present invention relates to photolithography technology and 3D printing technology, in particular to projection photolithography technology and maskless photolithography technology, and in particular to a photolithography type 3D printer. Background technique [0002] Traditional 3D printing generally adopts the "fusion deposition" or "laser sintering" method, that is, on the premise that the existing 3D model data of the object is available, each layer is decomposed to obtain the image of each thin layer, and the high temperature in the nozzle Heating to melt the raw material into a liquid state and then spraying it on the thin layer image, after cooling, a thin layer is obtained, or the tiny particles are flattened, and the thin layer image is scanned with a laser to melt and condense the particles into a thin layer; 3D solid. [0003] 3D printing with traditional methods has the following disadvantages: the control is complicated, the slight i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 马驰飞周绍林王楠陈昌龙高洪涛陈铭勇严伟胡松
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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