A photolithographic 3D printer
A 3D printer and lithography technology, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of high energy consumption, slow printing speed, and high control precision requirements, so as to improve processing accuracy and speed up printing The effect of speed, optimized image quality
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[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0026] Such as figure 1 As shown, the entire 3D printing system can be divided into five subsystems: light source system, image system, projection system, mechanical system, and electric control system. Described light source system is made up of LED light source 8, collimator 7 and beam expander mirror 6, and it sends multi-beam independent parallel light; The core component of described image system is DMD device 3, and it is controlled by computer, by adjusting each The reflective micromirror of the pixel is reflected to obtain a light beam with image information; the projection system is composed of a 4f system 5 and a plane mirror 9, which images the light beam to a fixed exposure surface to cure a layer of photoresist near the exposure surface , the mechanical system consists of a cup holder 10, a lithography cup 11, a printing substrate...
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