Multi-measuring range CMOS MEMS capacitive pressure sensor chip

Abstract

The invention relates to a multi-measuring range CMOS MEMS capacitive pressure sensor chip. The multi-measuring range CMOS MEMS capacitive pressure sensor chip comprises a glass pedestal and a silicon base and is characterized in that the silicon base is provided with a first pressure sensor unit, a second pressure sensor unit, a third pressure sensor unit, a fourth pressure sensor unit, a fifth pressure sensor unit and a sixth pressure sensor unit, wherein the first pressure sensor unit, the second pressure sensor unit, the third pressure sensor unit, the fourth pressure sensor unit, the fifth pressure sensor unit and the sixth pressure sensor unit comprise upper electrodes, lower electrodes and pressure films; and the lower electrodes of the first pressure sensor unit, the second pressure sensor unit, the third pressure sensor unit, the fourth pressure sensor unit, the fifth pressure sensor unit and the sixth pressure sensor unit are merged and connected through a metal aluminum wire. According to the invention, multiple measuring ranges are realized through multiple capacitive pressure sensor units with different dimensions, the sensitivity is high, and the measuring range scope is large.

Description

technical field [0001] The invention relates to a pressure sensor chip, in particular to a multi-range CMOS MEMS capacitive pressure sensor chip, belonging to the technical field of MEMS device design and manufacture. Background technique [0002] Pressure measurement is a major application aspect of MEMS technology. There are three main application aspects of pressure sensors: pressure monitoring, pressure control and physical quantity measurement. Pressure sensors have a wide range of applications, including automotive engineering, aviation navigation, consumer electronics and military applications. [0003] Today's mainstream pressure detection technologies include: capacitive pressure detection technology, piezoresistive pressure detection technology, and thermal pressure detection technology. Capacitive pressure sensors are one of the main types of silicon micro pressure sensors, and their basic principle is to convert changes in pressure into changes in capacitance. ...

AI Technical Summary

Problems solved by technology

The main disadvantages of traditional capacitive pressure sensor chips are as follows: (1) It is impossible to make it compatible with CMOS technology, and the integration of CMOS technology for sensor chips is the trend of sensor research and development; (2) A single range can only be used for a specific The measuring range is tested so that it cannot be used to the maximum extent

Images