A (ti,al,si)n-mo(s,n)2-ag/tialn nanometer multilayer coating
A nano-multilayer, coating technology, applied in the direction of coating, metal material coating process, layered products, etc., can solve the problem of single lubricating component, achieve low friction coefficient, excellent anti-wear performance, good lubricating effect Effect
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Embodiment 1
[0012] Example 1. Preparation of (Ti, Al, Si)N-Mo(S, N) on high-speed steel W6Mo5Cr4V2 2 -Ag / TiAlN nanometer multi-layer coating, its specific preparation process is as follows:
[0013] 1) Pretreatment: Cut the W6Mo5Cr4V2 high-speed steel plate into a sample of 20mm×20mm×3mm, drill a through hole with a diameter of 3mm in the middle and upper part of the sample, and rough grind, finely grind and polish the sample to make the surface rough The degree is less than 0.5 microns;
[0014] 2) Double-target co-sputtering to prepare monolayer (Ti,Al,Si)N-Mo(S,N) 2 -The process parameters and technical conditions of Ag coating are as follows: N 2 The partial pressure is 0.5Pa, the Ar partial pressure is 0.25Pa, the temperature is 150°C, the time is 200min, the bias voltage is -100V, and the duty cycle is 30%. The TiAlSiAg target is prepared by powder metallurgy. Its composition: Ti: 32at%, Al: 30at %, Si: 20at%, Ag: 18at%, target size: diameter 100mm, thickness: 10mm, sputtering po...
Embodiment 2
[0018] Example 2: Preparation of (Ti, Al, Si)N-Mo(S, N) on high-speed steel W6Mo5Cr4V2 2 -Ag / TiAlN nanometer multi-layer coating, its specific preparation process is as follows:
[0019] 1) Pretreatment: Cut the W6Mo5Cr4V2 high-speed steel plate into a sample of 20mm×20mm×3mm, drill a through hole with a diameter of 3mm in the middle and upper part of the sample, and rough grind, finely grind and polish the sample to make the surface rough The degree is less than 0.5 microns;
[0020] 2) Double-target co-sputtering to prepare monolayer (Ti,Al,Si)N-Mo(S,N) 2 -The process parameters and technical conditions of Ag coating are as follows: N 2 The partial pressure is 0.5Pa, the Ar partial pressure is 0.25Pa, the temperature is 150°C, the time is 200min, the bias voltage is -100V, and the duty cycle is 30%. The TiAlSiAg target is prepared by powder metallurgy. Its composition: Ti: 27at%, Al: 38at %, Si: 15at%, Ag: 20at%, target size: diameter 100mm, thickness: 10mm, sputtering po...
Embodiment 3
[0024] Example 3: Preparation of (Ti, Al, Si)N-Mo(S, N) on high-speed steel W6Mo5Cr4V2 2 -Ag / TiAlN nanometer multi-layer coating, its specific preparation process is as follows:
[0025] 1) Pretreatment: Cut the W6Mo5Cr4V2 high-speed steel plate into a sample of 20mm×20mm×3mm, drill a through hole with a diameter of 3mm in the middle and upper part of the sample, and rough grind, finely grind and polish the sample to make the surface rough The degree is less than 0.5 microns;
[0026] 2) Double-target co-sputtering to prepare monolayer (Ti,Al,Si)N-Mo(S,N) 2 -The process parameters and technical conditions of Ag coating are as follows: N 2 The partial pressure is 0.5Pa, the Ar partial pressure is 0.25Pa, the temperature is 150°C, the time is 200min, the bias voltage is -100V, and the duty cycle is 30%. The TiAlSiAg target is prepared by powder metallurgy. Its composition: Ti: 30at%, Al: 28at %, Si: 26at%, Ag: 16at%, target size: diameter 100mm, thickness: 10mm, sputtering po...
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