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Dust-removing apparatus

A dust removal device and formula technology, applied in cleaning methods and appliances, chemical instruments and methods, cleaning methods using gas flow, etc., can solve the problems of increased gas flow at the purifier head and large energy consumption

Active Publication Date: 2014-06-04
SHINKO +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, there is a problem in that the flow rate of gas supplied to the cleaner head (dust removal head) increases with the increase in size of the workpiece (substrate) to be dust removed, and a large amount of energy (electric power) is consumed.

Method used

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Embodiment Construction

[0028] Hereinafter, the present invention will be described in detail based on the illustrated embodiments.

[0029] The dust collection device involved in the present invention, such as figure 1 As shown, it is equipped with: a purifier head (dust removal head) 9, which has an air storage chamber 11 for supplying pressurized air and a suction chamber 12 for negative pressure inside; It supplies air to the air storage chamber 11 of the cleaner head 9 and vacuum-suctions the inside of the suction chamber 12 .

[0030] In addition, the internal pressure P of the air storage chamber 11 can be adjusted by adjusting the amount of air supplied to the air storage chamber 11 by the blower device using an inverter.

[0031] The cleaner head 9 has a nozzle portion 1 for ejecting air in the air storage chamber 11 to the outside, and a suction port 19 for communicating the outside with the suction chamber 12 .

[0032] And foreign matters such as fine particles adhering to the dust-remo...

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Abstract

Provided is a dust-removing apparatus with which excellent dust-removing effect can be obtained through small amount of energy. A dust-removed face (Wa) of a work (W) is disposed within the transitional area (E) formed on a downstream side to an end (50) of the potential core (5) of the jet (3) from the nozzle portion (1).

Description

technical field [0001] The invention relates to a dust removal device. Background technique [0002] Conventionally, in the manufacturing of LCD panels for household LCD TVs, smartphones, tablet terminals, etc., in order to increase the rate of qualified products, in the clean room process, the jet blown from the nozzle part of the purifier head is made to collide with plastic, glass, etc. On the surface of the substrate, foreign substances such as fine particles are removed (for example, refer to Patent Document 1). [0003] patent documents [0004] Patent Document 1: Japanese Patent Application Laid-Open No. 11-235559. Contents of the invention [0005] However, there is a problem that a large amount of energy (electric power) is consumed due to an increase in the flow rate of gas supplied to the cleaner head (dedusting head) as the size of the workpiece (substrate) to be dedusted increases. [0006] Therefore, an object of the present invention is to provide an effi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B5/02
CPCB08B5/04B08B5/02
Inventor 添本和彦加藤健司胁本辰郎宇泽启
Owner SHINKO