Method for measuring concentration of SOF2 in SF6 decomposition gas
A technology for decomposing gas and concentration, applied in the direction of color/spectral characteristic measurement, etc., can solve the problem of low gas concentration accuracy, achieve the effect of improving accuracy and simplifying the data processing process
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specific Embodiment approach 1
[0030] Specific implementation mode one: refer to figure 1 and figure 2 This embodiment will be specifically described, and the measurement of SF described in this embodiment 6 SOF in decomposition gas 2 The method of concentration is realized based on the following device, which includes: 18.5 μm laser 1, first condenser 2, sample cell 3, second condenser 4 and spectrometer 5;
[0031] The laser light emitted by the 18.5 μm laser 1 is transmitted to the sample pool 3 through the first condenser lens 2, and the sample pool 3 transmits the laser light to the second condenser lens 4, and the second condenser lens 4 transports the laser light to the incident slit of the spectrometer 5;
[0032] The incident slit of the spectrometer 5 is located at the focal point of the second condenser lens 4;
[0033] The sample cell 3 is used to fill the gas to be detected;
[0034] The measured SF 6 SOF in decomposition gas 2 The concentration method includes the following steps:
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specific Embodiment approach 2
[0039] Specific embodiment two: this embodiment is the measurement of SF described in specific embodiment one 6 SOF in decomposition gas 2 The concentration method is further described. In this embodiment, after the laser light emitted by the 18.5 μm laser 1 passes through the first condenser lens 2, the output light obtained is parallel light.
[0040] Since the output light obtained from the 18.5 μm laser 1 passing through the first condenser lens 2 is parallel light, the distance between the first condenser lens 2 and the sample cell 3 can be adjusted appropriately without affecting the detection results.
specific Embodiment approach 3
[0041] Specific embodiment three: this embodiment is the measurement of SF described in specific embodiment one 6 SOF in decomposition gas 2 The concentration method is further described. In this embodiment, the spectrometer 5 is a maya2kPRO spectrometer.
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