Stiffness Frequency Adjustable One-dimensional Micro-motion Platform Based on Stress Stiffening Principle
A technology of micro-movement platform and frequency adjustment, which is applied to workbenches, manufacturing tools, etc., can solve the problems of asymmetrical operation of flexible hinges with motion gaps, affecting the service life of the mechanism, etc., to reduce motion inertia, improve response speed, and improve performance. Effect
Active Publication Date: 2016-06-29
FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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Problems solved by technology
However, the mechanism adopts the displacement amplification method and there is a flexible hinge with stress concentration, which affects the service life of the mechanism
[0005] In addition, when the above two inventions are driven by piezoelectric ceramics, the load is transmitted through contact, and a certain pre-tightening force is required, resulting in a movement gap during the contact process and asymmetric work of the flexible hinge.
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[0033] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0034] Such as figure 1 and figure 2 As shown, the one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress stiffening includes a frame 1, a film group 201, a motion sub-platform 202, an outer frame 203, a driver, a working platform 4 and a frequency adjustment mechanism 7;
[0035] Both sides of the moving sub-platform 202 are connected to the inner wall of the outer frame 203 through the film group 201, the films in the film group 201 are arranged in parallel, and the length direction of the films is perpendicular to the moving sub-platform 202 movement direction;
[0036] The outer frame 203 is rigidly fixed to the frame 1, and the working platform 4 is rigidly fixed to the moving sub-platform 202;
[0037] The driver includes a stator 301...
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The invention relates to a one-dimensional micro-positioning platform with the adjustable rigidity frequency based on the stress rigidization principle, and the one-dimensional micro-positioning platform is applied to precise one-dimensional motion occasions and can be used for precise displacement compensation of a general one-dimensional motion platform. The one-dimensional micro-positioning platform comprises a motion sub-platform, a corresponding actuator and a micro-positioning workbench, a thin film set for adjusting the tension through a frequency adjusting mechanism serves as a flexible hinge to achieve manual or dynamic adjustment on the vibration frequency of the one-dimensional micro-positioning platform. By means of the structure, the frequency can be adjusted based on a prestress film, and the constant frequency of the micro-positioning platform can be adjusted before working or in working according to different working conditions and drive frequencies.
Description
technical field [0001] The invention relates to a precision motion platform, which can be used for precision operation and macro-micro composite high-speed precision compensation. The invention specifically relates to a one-dimensional micro-motion platform with adjustable stiffness and frequency based on the principle of stress rigidification. Background technique [0002] In order to realize one-dimensional precision movement, accurate and stable feed mechanism is particularly important, because it is closely related to the quality of the product. In addition, due to the small size and high precision of the complex optical free-form surface, strict requirements are placed on the micro-feed mechanism. The micro-feed system is the basis for processing such products, and it is widely used in fast-tool servo feed systems, micro-motion worktables, and macro-micro composite platforms. The traditional one-dimensional micro-feeding device usually adopts a fixed frequency design, ...
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IPC IPC(8): B25H1/00
Inventor 杨志军白有盾陈新高健杨海东王梦汤晖
Owner FOSHAN HUADAO SUPER PRECISION TECH CO LTD