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Problems solved by technology
At this time, if the cooling medium is not spread throughout the entire heat-insulating container, the object to be processed may not be cooled uniformly.
For example, in the case of heat treatment of steel as the object to be treated, differences in quenching may occur, and the hardness of the steel may become uneven
In addition, in the case of heat treatment of stainless steel as the object to be processed, sensitization may occur
Method used
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no. 1 Embodiment approach
[0032] figure 1 It is a side cross-sectional view for explaining the vacuum heat treatment apparatus 100 in the first embodiment, figure 2 yes figure 1 Sectional view on line II-II.
[0033] Such as figure 1 , figure 2 As shown, the vacuum heat treatment apparatus 100 is a so-called single-chamber type vacuum heat treatment apparatus that heats and cools the object W to be processed in a single chamber. The vacuum heat treatment apparatus 100 includes a vacuum furnace 110 , a heat insulating container 120 , a cover portion 130 , a heating portion 140 , a cooling device 150 , an induction plate 160 , and a moving mechanism 170 .
[0034] The vacuum furnace 110 is formed in a substantially cylindrical shape so as to withstand the pressure even when the pressure state in the vacuum furnace 110 changes. The vacuum furnace 110 in this embodiment is along the horizontal direction ( figure 1 , figure 2 The X-axis direction in the middle) is fixed and supported by a pluralit...
no. 2 Embodiment approach
[0074] Figure 8 It is a side cross-sectional view for explaining the vacuum heat treatment apparatus 200 in the second embodiment, Figure 9 is a planar cross-sectional view of the vacuum heat treatment apparatus 200 . Also, for the sake of illustration, Figure 9 In the figure, the top surface of the vacuum furnace 110 and the cover part 130a are omitted.
[0075] Such as Figure 8 As shown, the vacuum heat treatment apparatus 200 includes a vacuum furnace 110 , an insulating container 120 , a cover 130 , a heating unit 140 , a cooling device 150 , an induction plate 160 , a moving mechanism 170 , and a rectifying plate 210 . In addition, the functions of the vacuum furnace 110, the heat insulating container 120, the cover part 130, the heating part 140, the cooling device 150, the induction plate 160, and the moving mechanism 170 are substantially the same as those of the above-mentioned first embodiment, so the same reference numerals are assigned and repetitions are om...
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PUM
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Abstract
The vacuum heat treatment device includes: a guide plate used to guide a cooling medium supplied by a cooling unit, into a heat-insulating container through one of at least two openings of the heat-insulating container in a state where the two openings of the heat-insulating container are opened; and a movement mechanism used to move the guide plate so that at least part of the guide plate is inserted into a movement area of a cover portion in a state where the two openings of the heat-insulating container are opened and so that the guide plate is retracted from the movement area of the cover portion before the cover portion is moved in order to close the two openings of the heat-insulating container.
Description
technical field [0001] The present invention relates to a vacuum heat treatment device for heating an object to be treated in a vacuum state. Background technique [0002] In order to increase the hardness of steel, a so-called quenching treatment in which steel is heated to a predetermined temperature and then cooled is generally performed. Specifically, the steel is first heated to a temperature between 911°C and 1392°C under 1 atmospheric pressure, so that the steel becomes austenite. The austenite is then rapidly cooled to transform it into martensite. This increases the hardness of the steel. [0003] When performing heat treatment such as quenching, a vacuum heat treatment device is used. The vacuum heat treatment apparatus has a double structure including a vacuum furnace equipped with a heat-insulating container in which an object to be processed is disposed. In the case of heat treatment using a vacuum heat treatment apparatus, first, the vacuum furnace and the ...
Claims
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