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Optical element, analysis equipment, analysis method and electronic apparatus

A technology of optical components and analysis devices, applied in optical components, material analysis through optical means, optics, etc., can solve problems such as difficult on-the-spot analysis

Inactive Publication Date: 2014-08-27
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the existing technology, the detection of trace substances through sampling, analysis, and analysis requires special equipment and requires skilled inspection operators, so it is mostly difficult to analyze on the spot

Method used

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  • Optical element, analysis equipment, analysis method and electronic apparatus
  • Optical element, analysis equipment, analysis method and electronic apparatus
  • Optical element, analysis equipment, analysis method and electronic apparatus

Examples

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experiment example

[0156] Experimental examples are shown below to further describe the present invention, but the present invention is not limited to the following examples. The following examples are simulations performed using a computer.

[0157] 5.1. Calculation model

[0158] Figure 9 is a cross-sectional view schematically showing the basic structure of the model M used for the simulation. The model M used for the calculation of the experimental example, such as Figure 9 As shown, SiO is formed on a sufficiently thick Au layer (metal layer) that is opaque 2 layer (opaque layer), the SiO 2 Ag particles (metal particles) are formed on the layer. The shape of the Ag particles is a cylinder whose central axis is the Z-axis direction, and a plurality of Ag particles are arranged in a matrix at an equal pitch P along the X-axis direction and the Y-axis direction.

[0159] In this experiment example, FDTD software Fullwave of Cybernet Co., Ltd. was used for calculation. In addition, the...

experiment example 2

[0172] The pitch P of the Ag particles is fixed at 80nm, the thickness T of the Ag particles is fixed at 12nm and the SiO 2 The thickness G of the layer was fixed at 40 nm. Furthermore, the diameter D of the Ag particles was set to 30 nm, 40 nm, 50 nm, and 60 nm, and the relationship between the excitation wavelength and the degree of enhancement was investigated. The results are shown in Figure 13 .

[0173] according to Figure 13 It can be seen that the peak value (maximum value) of the degree of enhancement is greater than 40 or more in the model of D=30nm and 40nm than that of the model of D=50nm and 60nm. That is, it can be said that the same as that of Experimental Example 1 Figure 12 Likewise, the degree of enhancement becomes larger in the range of 30nm≤D≤40nm.

[0174] Generally, it is known that when the diameter D of Ag particles becomes larger and the distance between adjacent Ag particles becomes smaller, the local plasmon between Ag particles is enhanced,...

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Abstract

An optical element includes a metal layer in which a first direction is a thickness direction; metallic particles provided to be spaced from the metal layer in the first direction; and a light transmitting layer that separates the metal layer from the metallic particles, in which the size T of the metallic particles in the first direction satisfies a relationship of 3 nm≰T≰14 nm, and the size D of the metallic particles in a second direction orthogonal to the first direction satisfies a relationship of 30 nm≰D<50 nm.

Description

technical field [0001] The invention relates to an optical element, an analysis device, an analysis method and electronic equipment. Background technique [0002] Sensing technologies that can detect trace substances with high sensitivity, high precision, and rapid and simple detection are being sought in fields such as the medical / health field and the environment, food, and public security. There are many branches of trace substances as the object of sensing, such as bacteria, viruses, proteins, nucleic acids, various antigens / antibodies and other biologically related substances, as well as various compounds including inorganic molecules, organic molecules, and macromolecules. Object. In the prior art, the detection of trace substances through sampling, analysis, and analysis requires special equipment and requires skilled inspection operators, so it is often difficult to analyze on the spot. Therefore, it takes a long time (several days or more) until the test result is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/00G01N21/65G01N21/55
CPCG01N21/554G01N21/658G02B5/0816G02B5/008
Inventor 杉本守
Owner SEIKO EPSON CORP