Unlock instant, AI-driven research and patent intelligence for your innovation.

Microactuator device for deflecting electromagnetic radiation

A micro-actuator, electromagnetic radiation technology, applied in installation, instrumentation, optics, etc., to achieve cheap manufacturing, large deflection angle, space saving and compact effect

Inactive Publication Date: 2018-03-30
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the angular region over which the beam path can be unrestricted will in fact still be much smaller than this theoretical value, since the angle α of 15 degrees is only applicable for infinitely small beam diameters

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Microactuator device for deflecting electromagnetic radiation
  • Microactuator device for deflecting electromagnetic radiation
  • Microactuator device for deflecting electromagnetic radiation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] figure 1 Schematic representation of a microactuator designed as a scanner with a mirror plate 10 in different pivoting positions, a chip frame 11 surrounding the mirror, and the indicated incident beam bundle 12 and mirror plate in different positions Several deflected beam bundles 13,13',13". The beam entry angle or incident angle of the beam bundle 12, that is, the angle between the mirror surface in the idle position and the incident or outgoing beam is expressed as "γ", and the incident beam 12 The minimum angle between the scanned outgoing beam and the scanned outgoing beam is designated as "β", where this angle realizes the spatial separation of the incident beam and the area of ​​the scanning angle given by the oscillating mirror, and the angle "α" is the amplitude of the mechanical oscillation of the mirror 10 .As mentioned in the introductory part of this specification, this figure is used to illustrate the expected scanning angle of the MEMS scanner.

[004...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A microactuator arrangement for the deflection of electromagnetic radiation, with a mirror plate which is suspended on a drive frame in a movable manner about a first rotation axis via spring elements, wherein the drive frame is suspended on a chip frame in a movable manner about a second rotation axis via spring elements, wherein the drive frame is not closed and comprises a recess adjacent to the mirror plate and wherein the chip frame at least in the region of the recess of the drive frame is not closed, in a manner such that a deflected and / or incident beam is not inhibited by the drive frame and the chip frame.

Description

technical field [0001] The invention relates to a microactuator device for deflecting electromagnetic radiation. Background technique [0002] Resonantly operated micromirror actuators (MEMS scanners) are generally known in the art. It is commonly used to deflect laser light or other electromagnetic radiation. A micromirror actuator may be understood as a microtechnologically fabricated mirror that is movably suspended on torsion springs and / or bending springs and set in motion by electrostatic, electromagnetic, thermal or piezoelectric actuation. Resonant operation, achieved by matching the activation frequency to the natural frequency of the actuator, allows the mirror to achieve very large oscillation amplitudes, sometimes greater than + / -30 degrees. [0003] In most cases, MEMS scanners are applied so that the incident beam always forms an angle > 0 with respect to the deflected beam. This is achieved by angling the incident beam relative to the mirror surface norm...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/182
CPCG02B26/0833G02B26/0841G02B26/085G02B26/0858G02B26/101
Inventor 乌尔里希·霍夫曼
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV