Method and device for motion compensation in interferometric sensing system
A technology of sensing light and interferometric measurement, which is applied in the direction of measuring devices, adopting optical devices, converting sensor output, etc., and can solve the problems of lowering measurement results
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[0045] The following description presents specific details, such as specific examples, for purposes of explanation and not limitation. It will be understood, however, by those skilled in the art that other embodiments may be used that depart from these specific details. In some instances, detailed descriptions of well-known methods, interfaces, circuits, and devices are omitted so as not to obscure the description with unnecessary detail. In some figures, separate blocks are shown. Those skilled in the art will appreciate that the functions of these blocks may be implemented by using independent hardware circuits, using software programs and data in conjunction with a suitable programmable digital microprocessor or general purpose computer, and / or using application specific integrated circuits (ASICs) and and / or implemented using one or more digital signal processors (DSP). Software program instructions and data may be stored on non-transitory computer-readable storage media...
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