A silicon-based micro pulsating heat pipe with functional channel structure
A pulsating heat pipe and channel structure technology, applied in indirect heat exchangers, lighting and heating equipment, etc., can solve the problems of reducing the volume of liquid phase, reducing the overall size of the pulsating heat pipe, and increasing the overall size, so as to enhance heat transfer. capacity, enhancing the ability to carry heat loads and the effect of cooling and temperature control performance
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Embodiment 1
[0028] Such as figure 2 and 5 As shown, a silicon-based micro-pulsating heat pipe with a functional channel structure is formed by bonding a pair of semiconductor silicon chips 2 and a heat-resistant borosilicate glass sheet 5; Engraving technology etches a micro-groove 3 with a rectangular cross section; a vacuum / liquid injection hole 4 is processed on the borosilicate glass sheet 5; the vacuum / liquid injection hole 4 is connected with the vacuum / liquid injection microgroove on the semiconductor silicon wafer Corresponding to the top position of channel 1, the vacuum / injection microchannel 1 is connected to the microchannel 3, and 50% volume fraction of FC-72 is filled from the vacuum / injection hole 4.
[0029] figure 2 In this paper, the size of the silicon wafer is 50 mm×35 mm, the longitudinal length of the heat pipe is 40 mm, and the lateral width is 28 mm. The silicon wafer is engraved with 16 micro-grooves whose center line is parallel to the long end boundary of th...
Embodiment 2
[0032] Such as image 3 and 5 Shown, with embodiment 1, the difference is that the micro channel 3 of this functional channel structure silicon-based micro pulsation heat pipe and figure 2 There is a certain difference; the cross-sectional shape and depth of the microchannel are the same as in Example 1, but image 3 Only one of the widths of two adjacent microchannels in the heat pipe shows a continuous linear change along the length of the heat pipe channel. The equivalent diameter of the smaller side is 321.3 μm, and the equivalent diameter of the larger side is 400 μm; while the adjacent The width of the other microchannel remains unchanged at 525 μm, and the equivalent diameter is 365.2 μm.
[0033] Similarly, when the heating power is high, such as image 3 Under the shown channel structure, the vapor and liquid plugs in the channel of the silicon-based micro-pulsation heat pipe can also realize directional movement in the clockwise direction.
Embodiment 3
[0035] Same as Example 1 and Example 2, the cross-sectional shape and depth of the micro channel of the silicon-based micro pulsating heat pipe with functional channel structure are the same as those in Example 1, the longitudinal length of the heat pipe is 40 mm, and the transverse width is 24.5 mm. There are 14 micro-channels, and 7 U-shaped bends are formed on both sides; the cross-sectional shape of the micro-channels is rectangular, and the depth is 280 μm. The difference is that the micro-channels are as follows: Figure 4 As shown in middle 3; at this time, the variation of the width of the micro-channel is that one boundary of the micro-channel changes linearly along the channel length direction, while the other boundary is parallel to the boundary of the silicon wafer, and the width of the smaller side is 280 μm, the larger side is 770 μm, and the corresponding cross-sectional equivalent diameters at both ends of the channel are 280 μm and 410 μm, respectively.
[0036]...
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Abstract
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