Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof

Abstract

The invention provides a microsphere-based miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, eight uniformly-distributed electrodes, a miniature hemispherical resonator, a back circular hole and an adhesive layer, wherein the miniature hemispherical resonator is accurately located and automatically aligned by virtue of the back circular hole and is fixed on the monocrystalline silicon base through the adhesive layer, and the eight electrodes are uniformly distributed around the miniature hemispherical resonator; the miniature hemispherical resonator is excited to work by adopting an electrostatic driven manner, and a drive mode and a detection mode are respectively matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. The gyroscope provided by the invention has no need of manufacturing a hemispherical die, the miniature hemispherical resonator with a good structure can be provided, and meanwhile, automatic alignment is carried out, so that the method is convenient and is applicable to the mass production of the miniature hemispherical resonant gyroscope.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-motor technology, in particular to a micro-sphere-based miniature hemispherical resonant gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro gyroscope is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has become a research hotspot in this fie...

AI Technical Summary

Problems solved by technology

Micro-hemispherical resonator gyroscopes based on MEMS technology mostly use micro-scale hemispherical molds to make micro-hemispherical resonators. The symmetry and smoothness of the hemispherical mold directly affect the performance of micro-hemispherical resonators. Hemispherical mold for precise fabrication

In addition, the manufacture of micro-hemispherical resonators by MEMS technology usually relies on photolithography to position electrodes and hemispherical molds, which cannot achieve automatic alignment.

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