Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof

A technology of hemispherical resonant gyroscope and hemispherical resonator, which is applied in the process of producing decorative surface effect, microstructure technology, microstructure device, etc., which can solve the problem of affecting the miniature hemispherical resonator, the inability to accurately manufacture hemispherical molds, and the inability to realize Automatic alignment and other issues to achieve the effect of good symmetry and high smoothness

Active Publication Date: 2014-12-10
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Micro-hemispherical resonator gyroscopes based on MEMS technology mostly use micro-scale hemispherical molds to make micro-hemispherical resonators. The symmetry and smoothness of the hemispherical mold directly affect the performance of micro-hemispherical r

Method used

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  • Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof
  • Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof
  • Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof

Examples

Experimental program
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Example Embodiment

[0030] Example 1

[0031] Such as figure 2 As shown, this embodiment provides a micro hemispherical resonant gyroscope based on microspheres, including:

[0032] A single crystal silicon substrate 1;

[0033] Eight uniformly distributed electrodes 2;

[0034] A miniature hemispherical harmonic oscillator 3;

[0035] A round hole on the back 4;

[0036] An adhesion layer 5;

[0037] Among them: the central axis of the miniature hemispherical resonator 3 coincides with the central axis of the circular hole 4 on the back to achieve precise positioning and automatic alignment; the miniature hemispherical resonator 3 is fixed on the monocrystalline silicon substrate 1 through the adhesive layer 5; The electrodes 2 are evenly distributed around the miniature hemispherical resonator 3.

[0038] In this embodiment, the gyroscope uses micro-spheres with good structural symmetry and high smoothness to make a miniature hemispherical resonator 3; the gyroscope has a circular hole 4 on its back, whic...

Example Embodiment

[0054] Example 2

[0055] Basically the same as Example 1, the difference is:

[0056] In the fourth step of the manufacturing method of the above-mentioned microsphere-based miniature hemispherical resonant gyroscope, the sputtered metal protective layer is chromium or platinum or other metals that can play a protective role.

Example Embodiment

[0057] Example 3

[0058] Basically the same as Example 1, the difference is:

[0059] In the fifth step of the manufacturing method of the above-mentioned microsphere-based micro hemispherical resonant gyroscope, the adhesive used is other adhesives such as hot melt adhesive.

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Abstract

The invention provides a microsphere-based miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, eight uniformly-distributed electrodes, a miniature hemispherical resonator, a back circular hole and an adhesive layer, wherein the miniature hemispherical resonator is accurately located and automatically aligned by virtue of the back circular hole and is fixed on the monocrystalline silicon base through the adhesive layer, and the eight electrodes are uniformly distributed around the miniature hemispherical resonator; the miniature hemispherical resonator is excited to work by adopting an electrostatic driven manner, and a drive mode and a detection mode are respectively matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. The gyroscope provided by the invention has no need of manufacturing a hemispherical die, the miniature hemispherical resonator with a good structure can be provided, and meanwhile, automatic alignment is carried out, so that the method is convenient and is applicable to the mass production of the miniature hemispherical resonant gyroscope.

Description

technical field [0001] The invention relates to a gyroscope in the field of micro-motor technology, in particular to a micro-sphere-based miniature hemispherical resonant gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro gyroscope is self-evident. In particular, the micro-hemispherical resonant gyroscope, as an important research direction of the MEMS micro-gyroscope, has become a research hotspot in this fie...

Claims

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Application Information

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IPC IPC(8): G01C19/56B81C1/00
CPCB81C1/00373B81C1/00595B81C1/00849G01C19/56
Inventor 张卫平唐健刘亚东汪濙海成宇翔孙殿竣邢亚亮陈文元
Owner SHANGHAI JIAO TONG UNIV
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