Microsphere-based miniature hemispherical resonant gyroscope and manufacturing method thereof
A technology of hemispherical resonant gyroscope and hemispherical resonator, which is applied in the process of producing decorative surface effect, microstructure technology, microstructure device, etc., which can solve the problem of affecting the miniature hemispherical resonator, the inability to accurately manufacture hemispherical molds, and the inability to realize Automatic alignment and other issues to achieve the effect of good symmetry and high smoothness
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Example Embodiment
[0030] Example 1
[0031] Such as figure 2 As shown, this embodiment provides a micro hemispherical resonant gyroscope based on microspheres, including:
[0032] A single crystal silicon substrate 1;
[0033] Eight uniformly distributed electrodes 2;
[0034] A miniature hemispherical harmonic oscillator 3;
[0035] A round hole on the back 4;
[0036] An adhesion layer 5;
[0037] Among them: the central axis of the miniature hemispherical resonator 3 coincides with the central axis of the circular hole 4 on the back to achieve precise positioning and automatic alignment; the miniature hemispherical resonator 3 is fixed on the monocrystalline silicon substrate 1 through the adhesive layer 5; The electrodes 2 are evenly distributed around the miniature hemispherical resonator 3.
[0038] In this embodiment, the gyroscope uses micro-spheres with good structural symmetry and high smoothness to make a miniature hemispherical resonator 3; the gyroscope has a circular hole 4 on its back, whic...
Example Embodiment
[0054] Example 2
[0055] Basically the same as Example 1, the difference is:
[0056] In the fourth step of the manufacturing method of the above-mentioned microsphere-based miniature hemispherical resonant gyroscope, the sputtered metal protective layer is chromium or platinum or other metals that can play a protective role.
Example Embodiment
[0057] Example 3
[0058] Basically the same as Example 1, the difference is:
[0059] In the fifth step of the manufacturing method of the above-mentioned microsphere-based micro hemispherical resonant gyroscope, the adhesive used is other adhesives such as hot melt adhesive.
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