Unlock instant, AI-driven research and patent intelligence for your innovation.

electrical connection device

An electrical connection device and a technology for electrical connection, which are applied to the components, connections, coupling devices and other directions of the connection device, can solve problems such as long time, and achieve the effect of a simple device structure

Active Publication Date: 2017-04-26
NIHON MICRONICS
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Measurement can be started when the temperature is constant and the relative position between the electrode of the integrated circuit and the tip of the contact is constant, so it takes a long time to start the measurement

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • electrical connection device
  • electrical connection device
  • electrical connection device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0031] figure 1 is a diagram showing the overall structure of the electrical connection device including Embodiment 1 of the present invention, figure 2 It is a figure which schematically shows the structure of the electrical connection apparatus concerning Embodiment 1 of this invention.

[0032] Such as figure 1 , 2 As shown, the electrical connection device 1 according to Embodiment 1 of the present invention includes: a support member (reinforcing member) 12, which is flat, and whose lower surface is a flat installation reference plane; On the mounting surface of the support member 12; the probe card 19, which is a circular flat plate, is in contact with the semiconductor wafer 28 as the object to be inspected; and the electrical connection part 16, which is used to connect the wiring substrate 14 and the probe card 19 The electrical connection device 1 is held by a holder 20 .

[0033] The holder 20 is supported on the probe base 23 and has a crank-shaped cross-sec...

Embodiment approach 2

[0105] In Embodiment 1 of the present invention, the electrical connection device 1 including the flat pogo pin holder 16 a arranged so as to be in contact with the wiring board 14 was taken as an example and described, but the present invention is not limited thereto.

[0106] In Embodiment 2 of the present invention, an electrical connection device 1 including a pogo pin holder is described as an example. The protrusions are in contact with the wiring substrate 14 .

[0107] Figure 8 It is a figure which schematically shows the structure of the electrical connection apparatus 1 which concerns on Embodiment 2 of this invention. In addition, among the configurations included in the electrical connection device 1 according to Embodiment 2 of the present invention, the configurations included in the electrical connection device 1 according to Embodiment 1 of the present invention are the same as those included in the electrical connection device 1 according to Embodiment 1 of ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides an electrical connection device. It shortens the time until measurement starts with a simple device structure. It includes a wiring substrate (14), a probe card (19) and an electrical connection part (16), the wiring substrate is arranged above the top of the suction cup (21), and a wiring line ( 14a); the probe card has: a probe base plate (18), which is spaced from the wiring base plate, disposed in such a way that one side is opposite to the wiring base plate, and is formed with a wiring line ( 18e); and a plurality of probes (18a), which are arranged on the other side of the probe substrate in a manner connected to wiring lines (18e), and can be respectively connected to a plurality of connection soldering points of the semiconductor wafer (28) on the top of the chuck. The pad (28a) is in contact; the electrical connection portion electrically connects the wiring line (14a) to the wiring line (18e), and is connected using a low thermal conductivity support member (16f, 16g) that reduces heat conduction between the wiring substrate and the probe substrate .

Description

technical field [0001] The present invention relates to an electrical connection device used for electrical testing of a planar object to be inspected such as an integrated circuit, and more particularly to an electrical connection device capable of starting an electrical test in a short time. Background technique [0002] Generally, an electrical test is performed on an integrated circuit formed on a semiconductor wafer to determine whether it has predetermined electrical characteristics (that is, to determine whether the integrated circuit is good or not). Such a test uses an electrical connection device that electrically connects the electrodes of the integrated circuit to the circuit of the test device, and tests are performed on all the integrated circuits on one wafer simultaneously, or divided into multiple times. [0003] An electrical connection device for such a test includes, for example, as shown in Patent Document 1: a wiring board having a plurality of connecti...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01R1/02G01R1/073H01R13/502H01R13/24H01R31/06H01R12/71
CPCG01R1/07307G01R31/2887G01R1/0416G01R1/07342G01R31/26
Inventor 井上龙雄清藤英博新井治
Owner NIHON MICRONICS