Tunneling field effect transistor and manufacturing method thereof

Abstract

The invention provides a tunneling field-effect transistor. The tunneling field-effect transistor includes a substrate, a first gate dielectric layer and a second gate dielectric layer, a first gate and a second gate as well as a first doped region and a second doped region; the substrate is provided with a fin; the fin is provided with a first side surface and a second side surface which are opposite to each other as well as a third side surface and a fourth side surface which are opposite to each other; the first gate dielectric layer and the second gate dielectric layer are formed on the first side surface and the second side surface respectively; the first gate and the second gate are formed on the substrate and are connected with the first gate dielectric layer and the second gate dielectric layer respectively; the first doped region and the second doped region are formed on the substrate and are connected with the third side surface and the fourth side surface respectively; and the first doped region and the second doped region have different doping types. According to the tunneling field-effect transistor of the invention, the width of a tunneling junction is controlled through the width of a fin channel region, and a larger and more effective tunneling area can be provided, and thus, conduction current can be increased; tunneling occurs in a semiconductor layer, namely in a channel, and a tunneling layer is un-doped or lowly-doped, and therefore, leakage current can be reduced, and the sub threshold characteristics of the device can be improved; and double-gate control is adopted, so that bipolar conduction characteristics can be better controlled, and the on-off of the device can be realized.

Description

technical field [0001] The invention relates to the field of semiconductor devices, in particular to a tunneling field effect transistor and a manufacturing method thereof. Background technique [0002] With the continuous shrinking of the device size, the number of devices per unit area of ​​the chip is increasing, and how to reduce power consumption has become an increasingly prominent problem. [0003] The structure of a conventional tunneling field-effect transistor (Normal-TFET) mainly includes a substrate (channel), a gate dielectric layer, a gate, and source / drain regions on both sides of the gate, mainly based on the quantum tunneling effect. P-type tunneling field effect transistor is taken as an example. When a negative voltage is applied to the gate, the potential of the channel region increases, and quantum tunneling occurs from the source region to the channel region. The electrons and holes generated by the tunneling pass from the source region to the drain reg...

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Problems solved by technology

However, in order to reduce the sub-threshold swing and increase the conduction current, the tunneling junction needs to be as narrow as possible. However, the tunneling field effect transistor with the existing structure will always cause the diffusion distribution of impurities during the injection and heat treatment process, and it is difficult to achieve a narrow tunneling junction. tunneling junction

[0005] In addition, in conventional tunneling field effect transistors, the source and drain regions are highly doped, and the doping will inevitably introduce defects, and the leakage current associated with these defects will destroy the reduction of the subthreshold swing.

Moreover, conventional tunneling field effect transistors have bipolar characteristics that can be turned on at both positive and negative gate voltages, making it difficult to completely turn off the device

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