Microscopic imaging system capable of simultaneously obtaining appearance image and element distribution image
A technology of element distribution and microscopic imaging, which is applied in the direction of material analysis, material excitation analysis, and material analysis through optical means, which can solve the problems of large amount of test data, increased damage to the object to be tested, and reduced spatial resolution.
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[0038] The present invention will be further described in detail below in conjunction with the embodiments, so that those skilled in the art can implement it with reference to the description.
[0039] as attached figure 1 As shown, the present invention discloses a microscopic imaging system for simultaneously obtaining an appearance image and an element distribution image, that is, it can not only display the appearance image of an object, but also reflect the distribution of various elements in the object. For example, when detecting the iron sheet, while displaying its subtle images, it also reflects the content and distribution of chromium, carbon, and iron oxide compounds contained in the iron sheet. The microscopic imaging system includes:
[0040] Laser 1, which emits short pulse laser signals. When the short-pulse laser hits a certain position of the substance to be analyzed, it can excite the object at that position to generate plasma. The reflected light generate...
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