Equipment for micro-nano machining and surface morphology measurement and use method of equipment

Abstract

The invention discloses equipment for micro-nano machining and surface morphology measurement. The equipment comprises a base, a vertical base and three manual spiral platforms, wherein the vertical base is vertically fixed on the base; the three manual spiral platforms are in space quadrature distribution; the three manual spiral platforms refer to a Y-direction manual spiral platform which is mounted on the base, an X-direction manual spiral platform which is mounted on the Y-direction manual spiral platform, and a Z-direction manual spiral platform which is mounted on the vertical base; a x / y / z three-direction precise positioning platform is fixed on the X-direction manual spiral platform; an objective table is fixed on the x / y / z three-direction precise positioning platform; a probe system is arranged above the x / y / z three-direction precise positioning platform; the probe system is mounted on the lower surface of an L-shaped plate; the L-shaped plate is fixed on the Z-direction manual spiral platform. The invention further discloses a use method of the equipment. By adopting the equipment, micro-nano machining based on displacement and force and surface morphology measurement based on force are achieved.

Description

technical field [0001] The invention relates to the micro-nano field, in particular to a device for micro-nano processing and surface topography measurement and a method for micro-nano processing and surface topography measurement using the device. Background technique [0002] Micro-nano processing and surface topography measurement is an important direction in the field of micro-nano. The atomic force microscopes on the market can realize the above two functions, but the disadvantages are: 1) the precision of precise positioning is low, and precise micro-nano processing cannot be realized; 2) only force-based micro-nano processing can be realized, and the processing depth is difficult to predict; 3) The probe cantilever is a one-way support, which is easily affected by the processing direction. In addition to the atomic force microscope, there are other devices that can achieve these two functions. Although the positioning accuracy has been improved, they can generally on...

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Problems solved by technology

The atomic force microscopes on the market can realize the above two functions, but the disadvantages are: 1) the precision of precise positioning is low, and precise micro-nano processing cannot be realized; 2) only force-based micro-nano processing can be realized, and the processing depth is difficult to predict; 3) The probe cantilever is a one-way support, which is easily affected by the processing direction

In addition to the atomic force microscope, there are other devices that can achieve these two functions. Although the positioning accuracy has been improved, they can generally only achieve force-based micro-nano processing and surface measurement, and few can achieve displacement-based and force-based Two ways of micro-nanofabrication

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