Manufacture method of molybdenum alloy target material

Abstract

A manufacture method of a molybdenum alloy target material comprises the following steps: (1) molybdenum powder and at least one metallic element selected from titanium, chromium, niobium and tantalum groups are mixed with carbon powder to obtain uniform alloyed powder; (2) the alloyed powder is added into a pressurizing vessel, degassing process is carried out on the pressurizing vessel under vacuum, and a degassing hole is sealed; (3) pressurization and warming are carried out by a hot isostatic pressing technology, and oxygen is added into the pressurizing vessel such that the alloyed powder becomes an alloy blank; (4) the alloy blank undergoes annealing in a high temperature furnace; and (5) the alloy undergoes cutting, accurate grinding and machining to obtain a molybdenum alloy target material finished product. By the manufacture method, the know manufacture procedure of a molybdenum alloy target material can be simplified, production cycle of the molybdenum alloy target material can be shortened and plasticity of the molybdenum alloy material can be effectively raised.

Description

technical field [0001] The invention belongs to a method for making a molybdenum alloy target, which can simplify the conventional manufacturing process of the molybdenum alloy target, reduce the production cycle of the molybdenum alloy target, and greatly reduce the production cost. Background technique [0002] Molybdenum targets are widely used in industries such as flat panel displays, microelectronics and optical glass coating. If the coating needs to add heat resistance and corrosion resistance, sometimes other metals will be added to the molybdenum target to become a molybdenum alloy target. [0003] Because molybdenum metal has a high melting point, powder metallurgy is usually used to manufacture this material. Such as patent number TW I310407 "Sputtering target material and its preparation method": [0004] Prepare molybdenum powder with an average particle size of 6 microns, niobium powder with an average particle size of 100 microns, chromium powder with an ave...

AI Technical Summary

Problems solved by technology

[0015] However, in the patent number TW I310407 "Sputtering target material and its preparation method", when preparing molybdenum alloy, it is necessary to press the raw material powder with a cold equalizer to form a green body, and then use a jaw crusher and a disc mill to crush the green body , to produce secondary powder, and after the sintering is completed, the target blank needs to be subjected to multiple procedures such as hot rolling, etc., before it can be made into a molybdenum alloy sputtering target with uniform composition, which not only consumes time and money , and the product production cycle time is longer

[0016] And studies have shown that molybdenum crystals have a body-centered cubic crystal structure (Body-Centered Cubic Crystal Structure, BCC), and there are few independent slip systems. Stress concentration causes cracks and causes grain boundary fracture

At the same time, molybdenum alloys prepared by various technologies in industry contain a small amount of impurities such as oxygen, carbon, nitrogen, etc., and the existence of these residual impurities seriously affects the mechanical properties and structure of molybdenum alloy components.

The solubility of impurity elements such as oxygen, carbon and nitrogen in molybdenum is very low

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