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A device for supporting feet

A technology of supporting feet and supporting rings, applied in the direction of supporting machines, electrical components, engine frames, etc., can solve the problem of single installation of supporting feet, and achieve the effect of not being restricted by equipment structure, easy to implement, and avoid damage

Active Publication Date: 2017-07-25
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The purpose of the present invention is to overcome the above-mentioned defects in the prior art, and provide a new type of support foot device, which can overcome the defects of the single installation method of the support feet in the prior art

Method used

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  • A device for supporting feet
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Embodiment Construction

[0031] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0032] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0033] In the following specific embodiments of the present invention, please refer to figure 1 , figure 1 It is a structural schematic diagram of the assembly effect of a supporting foot device according to an embodiment of the present invention. Such as figure 1 As shown, the supporting foot device of the present invention includes a supporting ...

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Abstract

The invention discloses a supporting leg device which comprises a supporting ring and a plurality of supporting leg bodies installed along a slide groove in the circumference of the supporting ring. The supporting leg bodies and the supporting ring are flexibly connected in a magnetic contact mode, the installation position and centering distance can be freely adjusted in the circumferential direction of the supporting ring, and the damage caused to a mechanical arm during contact is avoided; by means of an annular supporting face structure, a supporting face is moved backwards, the diameter of the supporting ring can be decreased, a wafer is prevented from falling from the inner-diameter position of the supporting ring, and the 360-degree automatic centering can be achieved. The supporting leg device has the remarkable advantages of being simple in structure, easy to obtain, free of limit on the device structure and capable of saving device space.

Description

technical field [0001] The invention relates to the technical field of semiconductor wafer process equipment, in particular to a support foot device with adjustable position and automatic centering. Background technique [0002] The supporting foot device is used to place the wafer, so that the manipulator can take the wafer conveniently. The supporting foot device generally includes a circular supporting ring and several supporting feet installed along the circumference of the supporting ring. The disc-shaped wafers are placed horizontally on the supporting surfaces of the supporting legs, and the manipulator can pick up the wafers from between the two supporting legs. [0003] The existing supporting foot devices are usually semi-open, and can only adjust the front and rear distances from the supporting foot to the center of the circle. This kind of supporting foot device only needs to open corresponding centering grooves on the supporting ring to realize the centering a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/683F16M7/00
CPCH01L21/683H01L21/687H01L21/68721H01L21/68785
Inventor 李广义
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD
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