Magnetron component and magnetron sputtering device

A component and magnetron technology, applied in the field of magnetron sputtering equipment, can solve problems such as inconvenient operation and complex overall structure of the control mechanism, and achieve the effect of simple structure and cost reduction

Inactive Publication Date: 2015-07-01
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The overall structure of the above-mentioned control mechanism is complex and inconvenient to operate

Method used

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  • Magnetron component and magnetron sputtering device
  • Magnetron component and magnetron sputtering device
  • Magnetron component and magnetron sputtering device

Examples

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Embodiment Construction

[0031] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0032] As one aspect of the present invention, a magnetic control assembly is provided, which includes a magnet 10, a drive shaft 20 and a control mechanism 30, the control mechanism 30 is connected to the drive shaft 20, and the magnet 10 is arranged on the control mechanism 30, wherein, The control mechanism 30 includes a movable external gear 31 and a fixed gear 32, the fixed gear 32 can be fixedly arranged relative to the target material 40 to be sputtered, the teeth of the movable external gear 31 mesh with the teeth of the fixed gear 32, and the movable external The gear 31 is connected with the drive shaft 20 , and the magnet 10 is connected with the mova...

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PUM

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Abstract

The invention discloses a magnetron component. The magnetron component comprises a magnet, a driving shaft and a control mechanism. The control mechanism is connected to the driving shaft. The magnet is arranged on the control mechanism. The control mechanism comprises a movable external gear and a fixed gear member. The fixed gear member can be fixed relatively to a target material to be sputtered. The teeth of the movable external gear are engaged with teeth of the fixed gear member. The movable external gear is connected to the driving shaft. The magnet is connected to the movable external gear and is driven by the movable external gear to move on the target material. The invention also provides a magnetron sputtering device comprising the magnetron component. Through engagement of the movable external gear and the fixed gear member, the magnet can rotate around the central axis of the driving shaft and round the central axis of the movable external gear so that the magnet movement track covers a large part of zone of the target material. The magnetron component has a simple structure.

Description

technical field [0001] The present invention relates to the field of semiconductor equipment, in particular to a magnetron assembly and a magnetron sputtering device including the magnetron assembly. Background technique [0002] Sputtering refers to the phenomenon that energetic particles (such as argon ions) bombard the surface of a solid, causing various particles on the surface, such as atoms, molecules or clusters, to escape from the surface of the object. In the magnetron sputtering device, the plasma is generated in the chamber, and the positive ions of the plasma are attracted by the negative electricity of the cathode, bombard the target in the chamber, knock out the atoms of the target, and deposit on the substrate. [0003] In order to improve the effect of sputtering, a magnet is used near the target, which can force the electrons in the plasma to move in a certain orbit to increase the movement time of the electrons, thereby increasing the chance of collision be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35
Inventor 李杨超
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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