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Superconductive nanowire single-photon detector and manufacturing method thereof

A single-photon detector and superconducting nanowire technology, which is applied in the use of electrical radiation detectors for photometry, semiconductor devices, and final product manufacturing, etc., can solve problems such as low detection efficiency and lack of spatial resolution, and achieve improved The effect of detection efficiency, reduction of preparation cost, reduction of times and time

Active Publication Date: 2015-07-01
NANJING UNIV
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Problems solved by technology

The readout circuit of the series nanowire photon resolution detector is relatively simple, and its detection efficiency and the maximum number of resolved photons will not be affected by the leakage current, but it does not have the ability of spatial resolution, and the detection efficiency is not high

Method used

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  • Superconductive nanowire single-photon detector and manufacturing method thereof
  • Superconductive nanowire single-photon detector and manufacturing method thereof
  • Superconductive nanowire single-photon detector and manufacturing method thereof

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Embodiment Construction

[0036] The invention discloses a superconducting nanowire single photon detector with high detection efficiency that simultaneously realizes spatial resolution and photon number resolution. The chamber consists of three parts. N resistors with different resistance values ​​are respectively connected in parallel at both ends of the N-segment superconducting nanowire unit, where N can take any integer value greater than or equal to 2. When the resistance value of the resistor satisfies the proportional relationship of 1 / 4:3 / 8:1 / 2:1:2:4, the spatial resolution and photon number resolution of the incident photons can be realized by detecting the amplitude of the output pulse. Therefore, the present invention not only realizes photon number resolution, but also has the ability of space resolution. In addition, by adding an optical resonant cavity structure on the upper layer of the device, the detection efficiency of the system can be effectively improved. The present invention a...

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Abstract

The invention discloses a superconductive nanowire single-photon detector. The superconductive nanowire single-photon detector consists of N superconductive nanowire units which are connected in series, N parallel resistors of different resistance values and an optical resonator, wherein the N resistors of different resistance values are respectively connected with two ends of the N superconductive nanowire units in parallel; the optical resonator covers the upper layers of the N superconductive nanowire units which are connected in series. The superconductive nanowire single-photon detector not only can realize photon number discrimination, but also has a spatial discrimination capability. The invention also discloses a method for manufacturing the superconductive nanowire single-photon detector, wherein only is once electronic beam lithography needed to be carried out on nanowire patterns in the whole technological process, and thus the manufacturing cost of the superconductive nanowire single-photon detector is effectively reduced.

Description

technical field [0001] The invention relates to a superconducting nanowire single-photon detector and a preparation method thereof, in particular to a superconducting nanowire single-photon detector capable of simultaneously realizing spatial resolution and photon number resolution with high detection efficiency and a preparation method thereof, belonging to single-photon detection and In the field of extremely weak light detection technology, it is suitable for single-photon detection technology that needs to achieve photon resolution in the visible light and infrared bands. Background technique [0002] The single photon detector is a high-sensitivity ultra-low-noise device that detects extremely weak target signals by detecting and counting incident single photons. Therefore, there is a wide demand for high-performance single-photon detectors in emerging weak-light detection technology applications such as quantum communication, quantum computing, integrated circuit detec...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0304H01L31/18G01J1/42
CPCH01L31/09H01L31/18G01J1/42Y02P70/50
Inventor 康琳赵丽敏顾鹏吴培亨
Owner NANJING UNIV
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