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Nanostructure transfer method

一种纳米结构、转移方法的技术，应用在纳米结构操纵、特定纳米结构形成、微结构技术等方向，能够解决影响纳米结构后续应用、不能有机物清除等问题

Active Publication Date: 2015-09-02
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above methods cannot completely remove the organic matter, and some organic matter remains on the nanostructure and the target substrate, which affects the subsequent application of the nanostructure

Method used

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Embodiment Construction

[0025] The nanostructure transfer method provided by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0026] See figure 1 , the first embodiment of the present invention provides a method for transferring a nanostructure 20, comprising the following steps:

[0027] S10, providing a growth substrate 10, the growth substrate 10 has an upper surface 102, the upper surface 102 of the growth substrate 10 is provided with a plurality of nanostructures 20, and the plurality of nanostructures 20 form a nanostructure layer;

[0028] S11, providing an adhesive layer 30 covering the plurality of nanostructures 20;

[0029] S12, moving at least one of the adhesive layer 30 and the growth substrate 10 to keep the adhesive layer 30 away from the growth substrate 10, thereby separating the plurality of nanostructures 20 from the growth substrate 10 ;

[0030] S13, providing a target substrate 40, stac...

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Abstract

A method for transferring nanostructures includes providing a growth substrate and a number of nanostructures located on the growth substrate. The nanostructures are transferred by an adhesive layer from the growth substrate to a target substrate. The nanostructures are between the target substrate and the adhesive layer, and at least partial of nanostructures is in contact with a surface of the target substrate. The adhesive layer is covered by a metal layer. The adhesive layer together with the metal layer is separated from the nanostructures and the target substrate in an organic solvent by an external force, wherein the organic solvent permeates into an interface between the adhesive layer and the nanostructures.

Description

technical field [0001] The invention relates to a method for transferring nanostructures. Background technique [0002] The use of chemical vapor deposition (CVD) to grow nanostructures depends on the material and shape of the substrate. For example, lateral single-walled carbon nanotubes (SWCNTs) need to be grown on a quartz substrate. Graphene needs to be grown on copper foil. However, it is often necessary to place the nanostructure on a silicon wafer or a flexible substrate when making electronic devices using the nanostructure. Therefore, the industry has developed a nanostructure transfer technology in order to transfer the nanostructure from a growth substrate to a target substrate. [0003] In the prior art, a sacrificial layer is generally used to transfer the nanostructure, and the sacrificial layer is made of organic matter, such as PMMA (poly(methyl methacrylate)). First coat an organic substance on the nanostructure, the organic substance dries to form a sacr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
CPCB32B2309/66B32B2333/12B32B2311/24B32B37/025B32B2309/16B32B2311/18B32B37/30B32B38/08B32B2305/22B32B37/12B32B2311/04B81C2201/0191B32B38/10B82B3/0076B82B3/0014B81C1/00031B81B2207/056B81C2201/0194
Inventor 何宇俊李东琦李天一魏洋姜开利范守善
Owner TSINGHUA UNIV