Flake-type oxygen sensor and preparation method thereof
An oxygen sensor, chip technology, applied in the field of sensors, can solve the problems of scrapped samples, short service life, cracking of chip oxygen sensors, etc., and achieve the effect of not easy to crack and improve service life
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[0066] Please also refer to image 3 , the preparation method of the above-mentioned chip oxygen sensor 100 according to an embodiment, comprising the following steps:
[0067] S10, providing the signal layer 10 and the air channel support layer 20 laminated on the signal layer 10, the signal layer 10 includes an oxygen-sensitive substrate 110 and electrodes arranged on both sides of the oxygen-sensitive substrate 110, and the air channel support layer 20 is provided with a reference Air channel 210 .
[0068] The preparation method of the signal layer 10 is as follows:
[0069] S12. 5YSZ or 8YSZ with a mass ratio of 50-70:20-30:5-11:1-6:2-6:2-7, the first organic solvent, the first binder, and the first plasticizer , The first dispersant and the first defoamer are mixed evenly, and after ball milling for 12 to 36 hours, the cast slurry is obtained, and then, the cast slurry is formed into a film by tape casting, and the oxygen-sensitive matrix is formed after the film is ...
Embodiment 1
[0101] (1) Preparation of oxygen sensitive substrate, air channel support layer and heating substrate.
[0102] Mix 5YSZ, tetrahydrofuran, PVB, DOP, polyacrylic acid solution with a mass ratio of 50:30:5:6:5:5, and Dongfu Chemical’s model SRE-2031 foam breaker, and ball mill for 24 hours to obtain The casting slurry is then formed into a film by using a tape casting method, and the film is dried and solidified to form a green body. A green body with a thickness of 0.2 mm is prepared as an oxygen-sensitive matrix for future use. A green body with a thickness of 250 μm is prepared, and then laser cutting is used to cut and form air channels on the green body, and the green body formed with air channels is used as an air channel support layer for later use. A green body with a thickness of 350 μm was prepared and used as a heating substrate for later use.
[0103] (2) Prepare the signal layer.
[0104] The first electrode paste is screen-printed on one side of the oxygen-sensi...
Embodiment 2
[0127] (1) Preparation of oxygen sensitive substrate, air channel support layer and heating substrate.
[0128] Mix 5YSZ, hexane, PVB, DBP, polyacrylic acid solution and EFKA-2040 foam breaker with a mass ratio of 70:25:7:1:2:7 evenly, and after ball milling for 12 hours, The casting slurry is obtained, and then, the casting slurry is formed into a film by a tape casting method, and the film is dried and solidified to form a green body. A green body with a thickness of 0.4 mm is prepared as an oxygen-sensitive substrate for future use. A green body with a thickness of 400 μm is prepared, and then laser cutting is used to cut and form air channels on the green body, and the green body formed with air channels is used as an air channel support layer for later use. A green body with a thickness of 400 μm was prepared and used as a heating substrate for later use.
[0129] (2) Prepare the signal layer.
[0130] The preparation method of the signal layer is basically the same as...
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