Array substrate, manufacturing method thereof, liquid crystal display panel and display device
A technology for array substrates and base substrates, applied in optics, instruments, electrical components, etc., can solve problems such as complex manufacturing processes, achieve the effects of simplifying manufacturing processes, increasing aperture ratio, and reducing one-time patterning process
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[0101] Example 1: Such as figure 2 The manufacturing method of the array substrate shown, such as Figure 7a-Figure 7m As shown, it can specifically include the following steps:
[0102] 1. Form a pattern including a light shielding layer 17 on the base substrate 1, such as Figure 7a Shown
[0103] 2. The buffer layer 18 is formed on the base substrate 1 with the pattern of the light shielding layer 17, such as Figure 7b Shown
[0104] 3. On the buffer layer 18, an amorphous silicon material is used to form the active layer film 19, and the active layer film 19 is subjected to an excimer laser annealing process, such as Figure 7c Shown
[0105] 4. Perform a patterning process on the active layer film 19 after the excimer laser annealing process to form a pattern including the active layer 2, such as Figure 7d Shown
[0106] 5. A gate insulating layer 3 is formed on the base substrate 1 on which the pattern of the active layer 2 is formed, such as Figure 7e Shown
[0107] 6. Form a ...
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