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An inert surface treatment technology

A surface treatment and technology technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of no sampling tank production technology, dependence on imports of sampling tanks, complex manufacturing process, etc., and it is not easy to fall off. The effect of stability, dense film layer and firm bonding

Active Publication Date: 2018-04-17
杭州天净检测技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] To monitor volatile organic pollutants in the air, passivated Suma tanks must be used. Due to the high requirements on the smoothness and inertness of the inner surface of the tank wall, it has a complicated manufacturing process
China's monitoring of volatile organic pollutants (VOCs) in the air has just started, and there is no production technology for sampling tanks. So far, all sampling tanks used have been imported
The key technology for the production of passivated sampling tanks, that is, the passivation treatment of the inner surface of the tank, except for some test reports on the effect of passivation treatment, there is no public report, and this technology is even blank in China.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] Example 1: Inert Silicon Passivation Treatment of Thermos Cup

[0054] The processing sequence includes:

[0055] (1) Workpiece pretreatment: use lye for the thermos cup, then undergo electropolishing and ultrasonic cleaning in turn to clean the inner wall of the thermos cup;

[0056] (2) Vacuuming: Put the cleaned thermos cup into a vacuum reaction furnace, and then vacuumize it to a vacuum degree of 0.1Pa after sealing. During this process, it is repeatedly cleaned twice with nitrogen;

[0057] (3) Workpiece preheating: add high-purity nitrogen to the vacuum furnace to 350 Torr, start the vacuum furnace heating system, and heat the thermos cup to the preset reaction temperature of 550°C;

[0058] (4), reaction gas addition: open the vacuum system to pump out the nitrogen in the furnace to a vacuum of 0.1Pa in the furnace, keep the temperature and pressure stable, and add the main reaction gas SiH 4 up to 100 torr;

[0059] (5), maintain the temperature of the vacuu...

Embodiment 2

[0065] Embodiment 2: Inert treatment of the inner surface of the stainless steel gas sampling tank

[0066] The processing sequence includes:

[0067] (1) Workpiece pretreatment: the inner surface of the gas sampling tank is soaked in lye, electropolished, and ultrasonically cleaned to make the inner surface clean;

[0068] (2) Vacuuming: The cleaned gas sampling tank is placed in a vacuum reaction furnace, sealed and then vacuumed to a vacuum degree of 0.1 Pa. During this process, it is repeatedly cleaned twice with nitrogen;

[0069] (3) Workpiece preheating: add high-purity nitrogen to the vacuum furnace to 360 Torr, start the vacuum furnace heating system, and heat the gas sampling tank to the preset reaction temperature of 300°C;

[0070] (4), reaction gas addition: open the vacuum system to extract the nitrogen in the furnace to the vacuum degree in the furnace to 0.1Pa, keep the temperature and pressure stable, add the main reaction gas (CH 3 ) 3 SiH to 100 torr, the...

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Abstract

The invention discloses an inert surface treatment method, comprising (1) workpiece surface pretreatment; (2), placing the workpiece in a vacuum reaction furnace, and vacuumizing the workpiece to 1 Pa or below after sealing; (3), adding high-purity nitrogen in the Near 1 / 2 atmospheric pressure, heat the workpiece to the predetermined reaction temperature of 200°C-1200°C; (4), extract the nitrogen in the furnace to 1Pa or below in the furnace, add silicon-containing gas, and make the final pressure in the furnace below one atmospheric pressure (5), maintain the vacuum furnace temperature at the reaction temperature described in step (3), react for 0.5-8 hours; (6), stop heating / maintaining temperature, make the workpiece cool down, and extract the participating gas in the furnace to 1Pa or below ; (7) Repeat steps (2)-(6) several times for coatings that require a higher thickness; (8) After the temperature of the workpiece drops below 80°C, inject high-purity nitrogen gas of approximately one atmospheric pressure into the furnace , and then open the furnace to take out the workpiece.

Description

technical field [0001] The invention relates to an inert surface treatment technology for inert treatment on the surface of a workpiece. Background technique [0002] The stainless steel metal sampling tank (also known as Suma tank, air sampling tank) used in the sampling and analysis of air pollutants is an indispensable equipment in environmental monitoring and analysis. A sampling tank is a container for collecting and storing gas samples, usually spherical, prolate spherical, or barrel-shaped, with a volume ranging from 0.5 liters to 30 liters. The sampling tank is generally made of 316 or 316L stainless steel plate, which is welded after pressing and surface treatment. In order to reduce the adsorption of the tank wall to the analytes in the gas sample and reduce the catalytic activity of the decomposition and conversion reaction of the gas sample, the inner surface of the sampling tank must be specially treated to make it have a high degree of smoothness and inertness...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C16/22C23C16/30
Inventor 卢建杭章亦武张向铭王建福
Owner 杭州天净检测技术有限公司